JPS648699U - - Google Patents
Info
- Publication number
- JPS648699U JPS648699U JP10295387U JP10295387U JPS648699U JP S648699 U JPS648699 U JP S648699U JP 10295387 U JP10295387 U JP 10295387U JP 10295387 U JP10295387 U JP 10295387U JP S648699 U JPS648699 U JP S648699U
- Authority
- JP
- Japan
- Prior art keywords
- flange
- window
- attached
- foil
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011888 foil Substances 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Description
第１図はこの考案の実施例斜視図、第２図は第
１図のＡ−Ａ線断面図、第３図はこの考案の他の
実施例の要部拡大縦断面図である。
３……フランジ、４……開口、５……照射窓、
７……窓箔押え、８……気体噴出管体、９……Ｏ
リング、１０……間隙。
FIG. 1 is a perspective view of an embodiment of this invention, FIG. 2 is a sectional view taken along the line A--A in FIG. 1, and FIG. 3 is an enlarged longitudinal sectional view of a main part of another embodiment of this invention. 3...flange, 4...opening, 5...irradiation window,
7...Window foil presser, 8...Gas jet tube body, 9...O
Ring, 10... gap.
Claims (1)
フランジが形成されており、開口にはフランジに
取着されたＯリングを介して照射窓を形成する金
属箔が窓箔押えにより圧接されて気密に取り付け
られてなる電子線照射装置の走査管において、 フランジと窓箔押えとの間隙に対し直角方向に
気体を噴出する気体噴出管体をフランジ又は窓箔
押えのいずれか一方に固設したことを特徴とする
電子線照射装置の走査管。[Claims for Utility Model Registration] One end opening serves as an irradiation window, a flange is formed at the end, and a metal forming the irradiation window is inserted into the opening via an O-ring attached to the flange. In a scanning tube of an electron beam irradiation device in which foil is pressure-welded with a window foil holder and attached airtight, a gas ejection tube body that spews gas in a direction perpendicular to the gap between the flange and window foil holder is attached to the flange or window foil. A scanning tube for an electron beam irradiation device, characterized in that it is fixedly installed on either side of a presser foot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10295387U JPS648699U (en) | 1987-07-03 | 1987-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10295387U JPS648699U (en) | 1987-07-03 | 1987-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS648699U true JPS648699U (en) | 1989-01-18 |
Family
ID=31333335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10295387U Pending JPS648699U (en) | 1987-07-03 | 1987-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS648699U (en) |
-
1987
- 1987-07-03 JP JP10295387U patent/JPS648699U/ja active Pending