JPH034647U - - Google Patents
Info
- Publication number
- JPH034647U JPH034647U JP6497689U JP6497689U JPH034647U JP H034647 U JPH034647 U JP H034647U JP 6497689 U JP6497689 U JP 6497689U JP 6497689 U JP6497689 U JP 6497689U JP H034647 U JPH034647 U JP H034647U
- Authority
- JP
- Japan
- Prior art keywords
- window
- cooling
- outer end
- window foil
- foil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 4
- 239000011888 foil Substances 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Manipulator (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Description
第１図はこの考案の実施例を示す断面図、第２
図は第１図の一部拡大断面図、第３図は従来例の
断面図である。
１……真空チヤンバー、２……窓枠、３……冷
却桟、４……窓箔、５……固定板、３１……外端
。
Figure 1 is a sectional view showing an embodiment of this invention, Figure 2 is a sectional view showing an embodiment of this invention.
The figure is a partially enlarged sectional view of FIG. 1, and FIG. 3 is a sectional view of a conventional example. DESCRIPTION OF SYMBOLS 1...Vacuum chamber, 2...Window frame, 3...Cooling crosspiece, 4...Window foil, 5...Fixing plate, 31...Outer end.
Claims (1)
枠を設け、前記冷却桟の外端に窓箔を当てがつて
取り付けるとともに、前記窓箔の周囲を固定板で
固定してなる電子線照射窓において、 前記冷却桟の、前記窓箔が当てがわれる外端の
形状を、下に向かつて凸となる曲面形状としてな
る電子線照射窓。[Claim for Utility Model Registration] A window frame equipped with a cooling bar is provided at the open end of the vacuum chamber, a window foil is attached to the outer end of the cooling bar, and a fixing plate is provided around the window foil. In a fixed electron beam irradiation window, the outer end of the cooling crosspiece to which the window foil is applied has a curved shape that becomes convex downward.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989064976U JPH0722033Y2 (en) | 1989-06-02 | 1989-06-02 | Electron beam irradiation window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989064976U JPH0722033Y2 (en) | 1989-06-02 | 1989-06-02 | Electron beam irradiation window |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH034647U true JPH034647U (en) | 1991-01-17 |
| JPH0722033Y2 JPH0722033Y2 (en) | 1995-05-17 |
Family
ID=31596390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989064976U Expired - Fee Related JPH0722033Y2 (en) | 1989-06-02 | 1989-06-02 | Electron beam irradiation window |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0722033Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63177800U (en) * | 1987-05-09 | 1988-11-17 | ||
| JPS63183598U (en) * | 1987-05-18 | 1988-11-25 |
-
1989
- 1989-06-02 JP JP1989064976U patent/JPH0722033Y2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63177800U (en) * | 1987-05-09 | 1988-11-17 | ||
| JPS63183598U (en) * | 1987-05-18 | 1988-11-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0722033Y2 (en) | 1995-05-17 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |