JPS6484600A - Neutral particle incident device - Google Patents
Neutral particle incident deviceInfo
- Publication number
- JPS6484600A JPS6484600A JP62241421A JP24142187A JPS6484600A JP S6484600 A JPS6484600 A JP S6484600A JP 62241421 A JP62241421 A JP 62241421A JP 24142187 A JP24142187 A JP 24142187A JP S6484600 A JPS6484600 A JP S6484600A
- Authority
- JP
- Japan
- Prior art keywords
- pressure reducing
- pressure
- energy recovery
- pump
- reducing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Plasma Technology (AREA)
Abstract
PURPOSE:To reduce the size of an exhaust pump by providing a pressure reducing chamber at pre-and post-stages of an energy recovery equipment, reducing the pressure between a neutralized cell to a neutral beam receiving unit with differential exhaust. CONSTITUTION:Pressure reducing chambers 15, 16 are provided at pre-and post-stages of an energy recovery equipment 3, and the insides of these chambers 15, 16 are difference-discharged with three discharge pumps through discharge sections 17, 18, 11. The reduction is done in the following sequence: the pressure reducing chamber 15-the energy recovery unit 3-the pressure reducing chamber 16. Each pump can be reduced in its pressure effectively with less pump capacity. It is also possible to improve the effect by increasing the number of steps.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62241421A JPS6484600A (en) | 1987-09-25 | 1987-09-25 | Neutral particle incident device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62241421A JPS6484600A (en) | 1987-09-25 | 1987-09-25 | Neutral particle incident device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6484600A true JPS6484600A (en) | 1989-03-29 |
Family
ID=17074044
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62241421A Pending JPS6484600A (en) | 1987-09-25 | 1987-09-25 | Neutral particle incident device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6484600A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5281964A (en) * | 1990-02-26 | 1994-01-25 | Matsushita Electric Industrial Co., Ltd. | Traffic flow change monitoring system |
-
1987
- 1987-09-25 JP JP62241421A patent/JPS6484600A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5281964A (en) * | 1990-02-26 | 1994-01-25 | Matsushita Electric Industrial Co., Ltd. | Traffic flow change monitoring system |
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