JPS6484600A - Neutral particle incident device - Google Patents

Neutral particle incident device

Info

Publication number
JPS6484600A
JPS6484600A JP62241421A JP24142187A JPS6484600A JP S6484600 A JPS6484600 A JP S6484600A JP 62241421 A JP62241421 A JP 62241421A JP 24142187 A JP24142187 A JP 24142187A JP S6484600 A JPS6484600 A JP S6484600A
Authority
JP
Japan
Prior art keywords
pressure reducing
pressure
energy recovery
pump
reducing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62241421A
Other languages
Japanese (ja)
Inventor
Kiyoshi Hashimoto
Hideki Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62241421A priority Critical patent/JPS6484600A/en
Publication of JPS6484600A publication Critical patent/JPS6484600A/en
Pending legal-status Critical Current

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  • Plasma Technology (AREA)

Abstract

PURPOSE:To reduce the size of an exhaust pump by providing a pressure reducing chamber at pre-and post-stages of an energy recovery equipment, reducing the pressure between a neutralized cell to a neutral beam receiving unit with differential exhaust. CONSTITUTION:Pressure reducing chambers 15, 16 are provided at pre-and post-stages of an energy recovery equipment 3, and the insides of these chambers 15, 16 are difference-discharged with three discharge pumps through discharge sections 17, 18, 11. The reduction is done in the following sequence: the pressure reducing chamber 15-the energy recovery unit 3-the pressure reducing chamber 16. Each pump can be reduced in its pressure effectively with less pump capacity. It is also possible to improve the effect by increasing the number of steps.
JP62241421A 1987-09-25 1987-09-25 Neutral particle incident device Pending JPS6484600A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62241421A JPS6484600A (en) 1987-09-25 1987-09-25 Neutral particle incident device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62241421A JPS6484600A (en) 1987-09-25 1987-09-25 Neutral particle incident device

Publications (1)

Publication Number Publication Date
JPS6484600A true JPS6484600A (en) 1989-03-29

Family

ID=17074044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62241421A Pending JPS6484600A (en) 1987-09-25 1987-09-25 Neutral particle incident device

Country Status (1)

Country Link
JP (1) JPS6484600A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5281964A (en) * 1990-02-26 1994-01-25 Matsushita Electric Industrial Co., Ltd. Traffic flow change monitoring system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5281964A (en) * 1990-02-26 1994-01-25 Matsushita Electric Industrial Co., Ltd. Traffic flow change monitoring system

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