JPS6482526A - Jig for manufacturing semiconductor made of quartz glass - Google Patents

Jig for manufacturing semiconductor made of quartz glass

Info

Publication number
JPS6482526A
JPS6482526A JP23887687A JP23887687A JPS6482526A JP S6482526 A JPS6482526 A JP S6482526A JP 23887687 A JP23887687 A JP 23887687A JP 23887687 A JP23887687 A JP 23887687A JP S6482526 A JPS6482526 A JP S6482526A
Authority
JP
Japan
Prior art keywords
mold
metals
quartz
particles
content
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23887687A
Other languages
Japanese (ja)
Other versions
JPH0563440B2 (en
Inventor
Tsumoru Masui
Hiroshi Uchikawa
Hiroshi Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd, Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP23887687A priority Critical patent/JPS6482526A/en
Publication of JPS6482526A publication Critical patent/JPS6482526A/en
Publication of JPH0563440B2 publication Critical patent/JPH0563440B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/07—Impurity concentration specified

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

PURPOSE:To remove a stacking fault in the surface of an silicon substrate in a thermal oxidation process by specifying the content of alkali metals, alkali earth metals, transition metals and rare earth elements in impurity elements existing in a quartz glass material forming a semiconductor manufacturing jig at specific values or less. CONSTITUTION:Natural silica flour 10a is charged into a rotating type mold 2 made of carbon while a supply tube 3 for quartz particles is moved toward a drum section from the bottom of the mold 2. Consequently, particles 10b are attached onto the inner surface of the mold 2 in uniform layer thickness by centrifugal force. The synthetic quartz particles 10a are bonded onto the inwall of the mold 2 in uniform layer thickness from the upper section of a natural quartz layer while maintaining the revolution of the mold 2, heat sources 4 having a temperature higher than the melting points of the quartz particles 10a, 10b are introduced into the mold 2, and a particle layer is heated and melted, thus manufacturing a crucible 1. Accordingly, there are few stacking faults in a single crystal substrate pulled up by using the crucible 1 consisting of synthetic quartz in which the content of transition metals in a narrow sense is set to 3ppm a or below as 2ppm a or below of alkali metals and alkali earth metals and the content of rare earth elements to 20ppba or below.
JP23887687A 1987-09-25 1987-09-25 Jig for manufacturing semiconductor made of quartz glass Granted JPS6482526A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23887687A JPS6482526A (en) 1987-09-25 1987-09-25 Jig for manufacturing semiconductor made of quartz glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23887687A JPS6482526A (en) 1987-09-25 1987-09-25 Jig for manufacturing semiconductor made of quartz glass

Publications (2)

Publication Number Publication Date
JPS6482526A true JPS6482526A (en) 1989-03-28
JPH0563440B2 JPH0563440B2 (en) 1993-09-10

Family

ID=17036575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23887687A Granted JPS6482526A (en) 1987-09-25 1987-09-25 Jig for manufacturing semiconductor made of quartz glass

Country Status (1)

Country Link
JP (1) JPS6482526A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03262962A (en) * 1990-03-13 1991-11-22 Shin Etsu Handotai Co Ltd Dispenser and its using method
JPH046198A (en) * 1990-04-25 1992-01-10 Nkk Corp Crucible for production of silicon single crystal and method for making partition in crucible

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850955A (en) * 1981-09-22 1983-03-25 株式会社フオ−ブレイン Resin capsule and apparatus for molding resin floor denture and crown
JPS62176928A (en) * 1986-01-29 1987-08-03 Mitsubishi Metal Corp Production of quartz glass powder

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850955A (en) * 1981-09-22 1983-03-25 株式会社フオ−ブレイン Resin capsule and apparatus for molding resin floor denture and crown
JPS62176928A (en) * 1986-01-29 1987-08-03 Mitsubishi Metal Corp Production of quartz glass powder

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03262962A (en) * 1990-03-13 1991-11-22 Shin Etsu Handotai Co Ltd Dispenser and its using method
JPH046198A (en) * 1990-04-25 1992-01-10 Nkk Corp Crucible for production of silicon single crystal and method for making partition in crucible

Also Published As

Publication number Publication date
JPH0563440B2 (en) 1993-09-10

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