JPS6482446A - Electron beam illuminating device - Google Patents

Electron beam illuminating device

Info

Publication number
JPS6482446A
JPS6482446A JP23969287A JP23969287A JPS6482446A JP S6482446 A JPS6482446 A JP S6482446A JP 23969287 A JP23969287 A JP 23969287A JP 23969287 A JP23969287 A JP 23969287A JP S6482446 A JPS6482446 A JP S6482446A
Authority
JP
Japan
Prior art keywords
ion beam
conducting tube
sample
electron beam
illuminating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23969287A
Other languages
Japanese (ja)
Other versions
JP2561486B2 (en
Inventor
Tetsuo Tsukamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Origin Electric Co Ltd
Original Assignee
Origin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Origin Electric Co Ltd filed Critical Origin Electric Co Ltd
Priority to JP62239692A priority Critical patent/JP2561486B2/en
Publication of JPS6482446A publication Critical patent/JPS6482446A/en
Application granted granted Critical
Publication of JP2561486B2 publication Critical patent/JP2561486B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To reduce contamination by illuminating an ion beam guided into a device main body to a sample through a conducting tube fixed at the constant potential. CONSTITUTION:A conducting tube 7 made of stainless steel, nonmagnetic material such as ceramic material with good conductivity, magnetic material such as permalloy, or a combination of the nonmagnetic material and the magnetic material and fixed at the ground potential in the frame of an electron beam illuminating device main body is provided, and an ion beam is illuminated to a sample 6 through this conducting tube 7. The conducting tube 7 shields the ion beam from the electric field or the magnetic field or both of them in the frame, the mutual interference between the electron beam and the ion beam can be decreased, thus the focusing property of the ion beam is rarely reduced, and the ion beam with high energy density can be illuminated to the sample. Contamination can be thereby reduced.
JP62239692A 1987-09-24 1987-09-24 Electron beam irradiation device Expired - Lifetime JP2561486B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62239692A JP2561486B2 (en) 1987-09-24 1987-09-24 Electron beam irradiation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62239692A JP2561486B2 (en) 1987-09-24 1987-09-24 Electron beam irradiation device

Publications (2)

Publication Number Publication Date
JPS6482446A true JPS6482446A (en) 1989-03-28
JP2561486B2 JP2561486B2 (en) 1996-12-11

Family

ID=17048496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62239692A Expired - Lifetime JP2561486B2 (en) 1987-09-24 1987-09-24 Electron beam irradiation device

Country Status (1)

Country Link
JP (1) JP2561486B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54124366A (en) * 1978-03-06 1979-09-27 Midrex Corp Method of treating granular material with gas and its device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54124366A (en) * 1978-03-06 1979-09-27 Midrex Corp Method of treating granular material with gas and its device

Also Published As

Publication number Publication date
JP2561486B2 (en) 1996-12-11

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