JPS6481905A - Spectral element - Google Patents

Abstract

PURPOSE:To obtain a spectral element which has high strength and adequate resolving power and does not require intricate optical systems by alternately laminating silicon carbide and magnesium at respective film thicknesses in such a manner that the film thickness ratio of the silicon carbide and the magnesium attains 0.1-10. CONSTITUTION:This spectral element is the artificial multi-layered film which is provided with periodic structures by alternately laminating the silicon carbide (SiC) 2 and the magnesium (Mg) 3 respectively to >=1atom. and <=400Angstrom film thickness on a substrate 1 in such a manner that the film thickness ratio of the SiC 2 and the Mg 3 attains 0.1-10. Glass, silicon, sapphire, etc., having optically flat surfaces are used for the substrate 1. A vacuum deposition method or neutralized ion beam sputtering method, high-frequency sputtering method, etc., are used for the alternate lamination of the SiC 2 and the Mg 3. The spectral element which has the high strength and the adequate resolving power and does not require the intricate optical systems is thereby obtd.