JPS6477U - - Google Patents
Info
- Publication number
- JPS6477U JPS6477U JP9413387U JP9413387U JPS6477U JP S6477 U JPS6477 U JP S6477U JP 9413387 U JP9413387 U JP 9413387U JP 9413387 U JP9413387 U JP 9413387U JP S6477 U JPS6477 U JP S6477U
- Authority
- JP
- Japan
- Prior art keywords
- tip
- contact
- metal
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000523 sample Substances 0.000 description 3
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案一実施例の縦断面図、第２図は
従来の構成の接触装置の斜視図、第３図は従来の
構成の縦断面図である。第４図は、本発明の他の
実施例の平面図である。
１……接触子先端部（金属）、２……接触子本
体部（絶縁体）、３……被測定物、４……同軸ケ
ーブル、５……接触探針先端部（金属）、６……
接触探針本体部（絶縁体）、７……探針支持環（
絶縁体）。
FIG. 1 is a longitudinal sectional view of an embodiment of the present invention, FIG. 2 is a perspective view of a contact device having a conventional structure, and FIG. 3 is a longitudinal sectional view of a conventional structure. FIG. 4 is a plan view of another embodiment of the invention. DESCRIPTION OF SYMBOLS 1...Contact tip (metal), 2...Contact body (insulator), 3...Object to be measured, 4...Coaxial cable, 5...Contact probe tip (metal), 6... …
Contact probe main body (insulator), 7... Probe support ring (
Insulator).
Claims (1)
電性の金属の接触部を有し、先端の金属部から直
接測定用ケーブルに接続する事を特徴とする半導
体測定用接触装置。 A contact device for semiconductor measurement characterized by having a conductive metal contact part at the tip of a contact body made of an elastic insulator, and connecting directly to a measurement cable from the metal part at the tip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9413387U JPS6477U (en) | 1987-06-19 | 1987-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9413387U JPS6477U (en) | 1987-06-19 | 1987-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6477U true JPS6477U (en) | 1989-01-05 |
Family
ID=30957297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9413387U Pending JPS6477U (en) | 1987-06-19 | 1987-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6477U (en) |
-
1987
- 1987-06-19 JP JP9413387U patent/JPS6477U/ja active Pending