JPS647274U - - Google Patents
Info
- Publication number
- JPS647274U JPS647274U JP10062287U JP10062287U JPS647274U JP S647274 U JPS647274 U JP S647274U JP 10062287 U JP10062287 U JP 10062287U JP 10062287 U JP10062287 U JP 10062287U JP S647274 U JPS647274 U JP S647274U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- gas
- tube
- phase epitaxial
- reaction product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000007795 chemical reaction product Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10062287U JPS647274U (el) | 1987-06-30 | 1987-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10062287U JPS647274U (el) | 1987-06-30 | 1987-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS647274U true JPS647274U (el) | 1989-01-17 |
Family
ID=31328863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10062287U Pending JPS647274U (el) | 1987-06-30 | 1987-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS647274U (el) |
-
1987
- 1987-06-30 JP JP10062287U patent/JPS647274U/ja active Pending