JPH0296724U - - Google Patents
Info
- Publication number
- JPH0296724U JPH0296724U JP505189U JP505189U JPH0296724U JP H0296724 U JPH0296724 U JP H0296724U JP 505189 U JP505189 U JP 505189U JP 505189 U JP505189 U JP 505189U JP H0296724 U JPH0296724 U JP H0296724U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- substrate
- organometallic
- phase growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000001947 vapour-phase growth Methods 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000000197 pyrolysis Methods 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 150000002902 organometallic compounds Chemical class 0.000 claims 2
- 125000002524 organometallic group Chemical group 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP505189U JPH0296724U (el) | 1989-01-20 | 1989-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP505189U JPH0296724U (el) | 1989-01-20 | 1989-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0296724U true JPH0296724U (el) | 1990-08-01 |
Family
ID=31208089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP505189U Pending JPH0296724U (el) | 1989-01-20 | 1989-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0296724U (el) |
-
1989
- 1989-01-20 JP JP505189U patent/JPH0296724U/ja active Pending
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