JPS647263U - - Google Patents

Info

Publication number
JPS647263U
JPS647263U JP9917187U JP9917187U JPS647263U JP S647263 U JPS647263 U JP S647263U JP 9917187 U JP9917187 U JP 9917187U JP 9917187 U JP9917187 U JP 9917187U JP S647263 U JPS647263 U JP S647263U
Authority
JP
Japan
Prior art keywords
holder
vertical cvd
quartz
support rod
bring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9917187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH057240Y2 (US20100268047A1-20101021-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987099171U priority Critical patent/JPH057240Y2/ja
Publication of JPS647263U publication Critical patent/JPS647263U/ja
Application granted granted Critical
Publication of JPH057240Y2 publication Critical patent/JPH057240Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1987099171U 1987-06-26 1987-06-26 Expired - Lifetime JPH057240Y2 (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987099171U JPH057240Y2 (US20100268047A1-20101021-C00003.png) 1987-06-26 1987-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987099171U JPH057240Y2 (US20100268047A1-20101021-C00003.png) 1987-06-26 1987-06-26

Publications (2)

Publication Number Publication Date
JPS647263U true JPS647263U (US20100268047A1-20101021-C00003.png) 1989-01-17
JPH057240Y2 JPH057240Y2 (US20100268047A1-20101021-C00003.png) 1993-02-24

Family

ID=31326079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987099171U Expired - Lifetime JPH057240Y2 (US20100268047A1-20101021-C00003.png) 1987-06-26 1987-06-26

Country Status (1)

Country Link
JP (1) JPH057240Y2 (US20100268047A1-20101021-C00003.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60107843A (ja) * 1983-11-16 1985-06-13 Tekunisuko:Kk 組立式支持具
JPS61247048A (ja) * 1985-04-24 1986-11-04 Nec Corp 縦型拡散炉用ボ−ト
JPS6299476A (ja) * 1985-10-28 1987-05-08 Agency Of Ind Science & Technol プラズマcvd装置の放電電極

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60107843A (ja) * 1983-11-16 1985-06-13 Tekunisuko:Kk 組立式支持具
JPS61247048A (ja) * 1985-04-24 1986-11-04 Nec Corp 縦型拡散炉用ボ−ト
JPS6299476A (ja) * 1985-10-28 1987-05-08 Agency Of Ind Science & Technol プラズマcvd装置の放電電極

Also Published As

Publication number Publication date
JPH057240Y2 (US20100268047A1-20101021-C00003.png) 1993-02-24

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