JPS6472017A - Apparatus for measuring spectral characteristics of laser beam - Google Patents

Apparatus for measuring spectral characteristics of laser beam

Info

Publication number
JPS6472017A
JPS6472017A JP22215187A JP22215187A JPS6472017A JP S6472017 A JPS6472017 A JP S6472017A JP 22215187 A JP22215187 A JP 22215187A JP 22215187 A JP22215187 A JP 22215187A JP S6472017 A JPS6472017 A JP S6472017A
Authority
JP
Japan
Prior art keywords
plate
mirror
plates
bottom plate
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22215187A
Other languages
Japanese (ja)
Inventor
Furadeimirobichi Karup Fuedoru
Kimobichi Kurupan Arekusandoru
Yuriebichi Borukowa Serugei
Bashiriebichi Sumirunof Bareri
Petorobichi Shidor Furadeimiru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INSUCHI FIZ AN BERORUSUSUKOI S
INSUCHI FIZ AN BERORUSUSUKOI SSR
INSUCHI OBUSUCHIEI FIZ AN SSSR
Original Assignee
INSUCHI FIZ AN BERORUSUSUKOI S
INSUCHI FIZ AN BERORUSUSUKOI SSR
INSUCHI OBUSUCHIEI FIZ AN SSSR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INSUCHI FIZ AN BERORUSUSUKOI S, INSUCHI FIZ AN BERORUSUSUKOI SSR, INSUCHI OBUSUCHIEI FIZ AN SSSR filed Critical INSUCHI FIZ AN BERORUSUSUKOI S
Priority to JP22215187A priority Critical patent/JPS6472017A/en
Publication of JPS6472017A publication Critical patent/JPS6472017A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0246Measuring optical wavelength

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

PURPOSE: To provide a highly stable instrument for measuring spectral characteristic of laser beam having high measurement accuracy and a small size by constituting an interferometer by providing two plates as a mirror and a bottom plate, respectively, and a wedge-shaped plate working as a mirror in the clearance of the bottom plate. CONSTITUTION: A single block unit 8 is provided with a bottom plate 16 and a plate 17 (having an internal surface coated with an applied material 18) which becomes a common mirror and a clearance (a) is maintained between the plates 16 and 17 with pillars 19. The bottom plate 16 has two side faces and supports, for example, four wedge-shaped plates 20 provided at average distances of a1 -a4 from the side faces of the plate 16. One side face of each plate 20 is coated with an applied material 21 for mirror which constitutes a Fizeau interferometer together with the applied material 18. The values of the average sizes a1 -a4 of the pillars 19 and plates 20 are governed by conditions which are in harmony with the average bases H1 -h4 of the interferometer. A laser beam 6 enters a container 24 through a window 25, is split into four beams 7 by the four mirrors 11, and irradiates the material 18. Then split beams form an interference pattern of a narrow zone behind the plate 17 and the pattern is photodetected 9 and data-processed 10. As a result, the position and width of the interference zone and the wavelength of the beam 6 are decided.
JP22215187A 1987-09-07 1987-09-07 Apparatus for measuring spectral characteristics of laser beam Pending JPS6472017A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22215187A JPS6472017A (en) 1987-09-07 1987-09-07 Apparatus for measuring spectral characteristics of laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22215187A JPS6472017A (en) 1987-09-07 1987-09-07 Apparatus for measuring spectral characteristics of laser beam

Publications (1)

Publication Number Publication Date
JPS6472017A true JPS6472017A (en) 1989-03-16

Family

ID=16777980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22215187A Pending JPS6472017A (en) 1987-09-07 1987-09-07 Apparatus for measuring spectral characteristics of laser beam

Country Status (1)

Country Link
JP (1) JPS6472017A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015233006A (en) * 2014-06-02 2015-12-24 シュネーデル、エレクトリック、インダストリーズ、エスアーエスSchneider Electric Industries Sas Detection system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015233006A (en) * 2014-06-02 2015-12-24 シュネーデル、エレクトリック、インダストリーズ、エスアーエスSchneider Electric Industries Sas Detection system

Similar Documents

Publication Publication Date Title
TW367407B (en) Interferometer system with two wavelengths, and lithographic apparatus provided with such a system
GB1458298A (en) Multiplex interferometer
DE3064960D1 (en) Process and apparatus for measuring distance by laser interferometry with two wavelengths
GB1287612A (en) Improvements in and relating to interferential devices
GB1437517A (en) Optical interference gauge and flatness-testing apparatus
US4093338A (en) Apparatus for piecewise generation of grating-like patterns
DE3471368D1 (en) Interferometric thickness analyzer and measuring method
JPS6472017A (en) Apparatus for measuring spectral characteristics of laser beam
WO2002001169A8 (en) Apparatus and method for substantially simultaneous measurement of emissions
Bray Stitching interferometer for large optics: recent developments of a system
JPS58169004A (en) Highly accurate interference length measuring method in atmosphere
US3776636A (en) Process and apparatus for investigating the coherence of light radiation
US3419331A (en) Single and double beam interferometer means
FR2088257B2 (en)
JPS6435304A (en) Method and instrument for measurement of absolute distance
US6064481A (en) Method and apparatus for positioning object in space using a low-coherence laser beam which is reflected by two references to sharpen the interference fringe lines
JPH05272913A (en) Highly-accurate gage interferometer
GB1308957A (en) Methods and apparatus for determining the distance of an object
SU1052856A1 (en) Interference device for gauging dimensions of part
JPS6412203A (en) Compound type laser length measuring system and length measuring apparatus
TW223146B (en) Measuring interferometer
JPH026348Y2 (en)
FR2375577A1 (en) Interferometer for measurement of displacement - utilises circular polarisation in opposing directions of luminous measurement and reference beams
FR2455271A1 (en) Measuring leakage from pressurised container - is determined by calculator from change in refractive index of contents
SU767508A1 (en) Interference comparator for measuring plane-parallel rod gage