JPS647036A - Photopolymerizable negative type resist - Google Patents

Photopolymerizable negative type resist

Info

Publication number
JPS647036A
JPS647036A JP16316487A JP16316487A JPS647036A JP S647036 A JPS647036 A JP S647036A JP 16316487 A JP16316487 A JP 16316487A JP 16316487 A JP16316487 A JP 16316487A JP S647036 A JPS647036 A JP S647036A
Authority
JP
Japan
Prior art keywords
resist
negative type
photopolymn
compd
initiator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16316487A
Other languages
Japanese (ja)
Inventor
Shigeki Shimizu
Toshiyoshi Urano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kasei Corp
Original Assignee
Mitsubishi Kasei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kasei Corp filed Critical Mitsubishi Kasei Corp
Priority to JP16316487A priority Critical patent/JPS647036A/en
Publication of JPS647036A publication Critical patent/JPS647036A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031—Organic compounds not covered by group G03F7/029

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

PURPOSE:To improve the shelf stability of a resist by using a copolymer having structural units formed from methacrylic acid and methyl methacrylate, a lipophilic plasticizer, a compd. having polymerizable terminal ethylene groups and a photopolymn. initiator which is activated by active rays as constituents of the resist. CONSTITUTION:This photopolymerizable negative type resist contains a copolymer having two kinds of structural units formed from methacrylic acid and methyl methacrylate and having 10,000-500,000 weight average mol.wt., a lipophilic plasticizer such as phthalic diester or glycol ester, a compd. having two or more polymerizable terminal ethylene groups and >=100 deg.C b.p. under ordinary pressure, e.g., unsatd. carboxylic acid and a photopolymn. initiator which is activated by active rays, e.g., benzoin. The resist has superior sensitivity, etching resistance, strippability and shelf stability.
JP16316487A 1987-06-30 1987-06-30 Photopolymerizable negative type resist Pending JPS647036A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16316487A JPS647036A (en) 1987-06-30 1987-06-30 Photopolymerizable negative type resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16316487A JPS647036A (en) 1987-06-30 1987-06-30 Photopolymerizable negative type resist

Publications (1)

Publication Number Publication Date
JPS647036A true JPS647036A (en) 1989-01-11

Family

ID=15768450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16316487A Pending JPS647036A (en) 1987-06-30 1987-06-30 Photopolymerizable negative type resist

Country Status (1)

Country Link
JP (1) JPS647036A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007131033A (en) * 2005-11-08 2007-05-31 Delta Kogyo Co Ltd Slide adjuster for vehicle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007131033A (en) * 2005-11-08 2007-05-31 Delta Kogyo Co Ltd Slide adjuster for vehicle

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