JPS6469903A - Method for calculating center of cross mark - Google Patents
Method for calculating center of cross markInfo
- Publication number
- JPS6469903A JPS6469903A JP22536887A JP22536887A JPS6469903A JP S6469903 A JPS6469903 A JP S6469903A JP 22536887 A JP22536887 A JP 22536887A JP 22536887 A JP22536887 A JP 22536887A JP S6469903 A JPS6469903 A JP S6469903A
- Authority
- JP
- Japan
- Prior art keywords
- mark
- center
- coordinates
- picture
- calculated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To enhance positioning accuracy to a large extent, by calculating the center of the arbitrary part of each foot of a cross mark from the binarized image of said mark and calculating the coordinates of the intersecting point of two straight lines connecting respectively opposed centers to set the same as the center of the cross mark. CONSTITUTION:The positioning cross mark 1 marked on a photomask is imaged in the picture 2 of a TV camera and, at this time, the feet 1a-1d of the mark 1 are imaged so as to pierce through the sides 2a-2d in the horizontal and vertical directions of the picture 2 to be converted to binarized images. Herein, strip like windows 3a-3d having the width corresponding to several rasters or several pixels are provided along the peripheral edge of the picture 2 to cut out a picture region and the rectangular binarized images 4a-4d by the feet 1a-1d are obtained. The coordinates of centers 5a-5d are calculated from the coordinates of the apexes of these rectangles 4a-4d and opposed centers are connected to calculate two straight lines 6, 7 and the coordinates of the intersecting point 8 thereof are calculated to be set to the center of the mark 1. By this method, the center of the mark can be calculated with the accuracy of a pixel unit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22536887A JPS6469903A (en) | 1987-09-10 | 1987-09-10 | Method for calculating center of cross mark |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22536887A JPS6469903A (en) | 1987-09-10 | 1987-09-10 | Method for calculating center of cross mark |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6469903A true JPS6469903A (en) | 1989-03-15 |
Family
ID=16828254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22536887A Pending JPS6469903A (en) | 1987-09-10 | 1987-09-10 | Method for calculating center of cross mark |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6469903A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5640241A (en) * | 1994-02-23 | 1997-06-17 | Kabushikikaisha Wacom | Light spot position measuring method of detecting one-dimensional position by two-dimensional sensor |
JP2008241255A (en) * | 2007-03-23 | 2008-10-09 | Sumitomo Heavy Ind Ltd | Method of detecting alignment mark position and laser machining device using method thereof |
JP2011047674A (en) * | 2009-08-25 | 2011-03-10 | Nec Engineering Ltd | Device and method for detecting center of cross pattern |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS603504A (en) * | 1983-06-22 | 1985-01-09 | Sumitomo Bakelite Co Ltd | Detector for positioning |
-
1987
- 1987-09-10 JP JP22536887A patent/JPS6469903A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS603504A (en) * | 1983-06-22 | 1985-01-09 | Sumitomo Bakelite Co Ltd | Detector for positioning |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5640241A (en) * | 1994-02-23 | 1997-06-17 | Kabushikikaisha Wacom | Light spot position measuring method of detecting one-dimensional position by two-dimensional sensor |
JP2008241255A (en) * | 2007-03-23 | 2008-10-09 | Sumitomo Heavy Ind Ltd | Method of detecting alignment mark position and laser machining device using method thereof |
JP2011047674A (en) * | 2009-08-25 | 2011-03-10 | Nec Engineering Ltd | Device and method for detecting center of cross pattern |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS57206818A (en) | Display device for running trace | |
DE3686104D1 (en) | DEVICE FOR DETECTING MOVEMENT IN TELEVISION. | |
DK166339C (en) | VIDEO DISPLAY SYSTEM FOR DISPLAYING VIDEO SIGNALS WITH SIZE AND STANDARD FORMAT | |
JPS5367318A (en) | Display system | |
IT8419014A0 (en) | DEVICE FOR DISPLAYING TELEVISION IMAGES AND DEFLECTION UNIT FOR THE SAME. | |
JPS6469903A (en) | Method for calculating center of cross mark | |
EA200501474A1 (en) | METHOD OF CODING THE COORDINATES OF MOVING ON THE SCREEN COMPUTING VIDEO DEVICE | |
JPS6468084A (en) | Skip-watching device for moving image signal | |
TW344006B (en) | Method and device for inserting a column of stabilizing material into the ground | |
BE888386A (en) | DEVICE AND METHOD FOR CORRECTING SPATIAL AND MASKING ERRORS APPEARING IN A TELEVISION IMAGE, | |
DE69018233D1 (en) | Image processing system for the reproduction of large images overlaid with small images. | |
JPS6464062A (en) | Editing system for pattern picture data | |
DE69230725D1 (en) | DEVICE AND METHOD FOR SMOOTHING IMAGES | |
JPS53148234A (en) | High-speed multiplication and division system between image data | |
JPS53111233A (en) | Character display unit of cathode-ray tube | |
JPS54114130A (en) | Mark quality deciding method | |
DE3775888D1 (en) | VERTICAL DEFLECTION CIRCUIT IN AN IMAGE DISPLAY DEVICE. | |
JPS5547782A (en) | Correlativity tracking unit | |
DE3780473T2 (en) | DEVICE FOR PROVIDING VIDEO DATA FOR REFRESHING IMAGE ELEMENTS IN A DISPLAY DEVICE. | |
JP3034267U (en) | Frame structure that makes it easy to position a photographic print | |
JPS51126712A (en) | Television picture control method and device thereof | |
ATE122195T1 (en) | DEVICE FOR GRID CORRECTION IN A TELEVISION. | |
JPS6486682A (en) | Video projector | |
JPS54826A (en) | Display unit for characters or the like | |
JPS51114829A (en) | Picture split indication control system |