JPS6469903A - Method for calculating center of cross mark - Google Patents

Method for calculating center of cross mark

Info

Publication number
JPS6469903A
JPS6469903A JP22536887A JP22536887A JPS6469903A JP S6469903 A JPS6469903 A JP S6469903A JP 22536887 A JP22536887 A JP 22536887A JP 22536887 A JP22536887 A JP 22536887A JP S6469903 A JPS6469903 A JP S6469903A
Authority
JP
Japan
Prior art keywords
mark
center
coordinates
picture
calculated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22536887A
Other languages
Japanese (ja)
Inventor
Shinichi Hattori
Kazuhiro Aida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Avionics Co Ltd
Original Assignee
Nippon Avionics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Avionics Co Ltd filed Critical Nippon Avionics Co Ltd
Priority to JP22536887A priority Critical patent/JPS6469903A/en
Publication of JPS6469903A publication Critical patent/JPS6469903A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To enhance positioning accuracy to a large extent, by calculating the center of the arbitrary part of each foot of a cross mark from the binarized image of said mark and calculating the coordinates of the intersecting point of two straight lines connecting respectively opposed centers to set the same as the center of the cross mark. CONSTITUTION:The positioning cross mark 1 marked on a photomask is imaged in the picture 2 of a TV camera and, at this time, the feet 1a-1d of the mark 1 are imaged so as to pierce through the sides 2a-2d in the horizontal and vertical directions of the picture 2 to be converted to binarized images. Herein, strip like windows 3a-3d having the width corresponding to several rasters or several pixels are provided along the peripheral edge of the picture 2 to cut out a picture region and the rectangular binarized images 4a-4d by the feet 1a-1d are obtained. The coordinates of centers 5a-5d are calculated from the coordinates of the apexes of these rectangles 4a-4d and opposed centers are connected to calculate two straight lines 6, 7 and the coordinates of the intersecting point 8 thereof are calculated to be set to the center of the mark 1. By this method, the center of the mark can be calculated with the accuracy of a pixel unit.
JP22536887A 1987-09-10 1987-09-10 Method for calculating center of cross mark Pending JPS6469903A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22536887A JPS6469903A (en) 1987-09-10 1987-09-10 Method for calculating center of cross mark

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22536887A JPS6469903A (en) 1987-09-10 1987-09-10 Method for calculating center of cross mark

Publications (1)

Publication Number Publication Date
JPS6469903A true JPS6469903A (en) 1989-03-15

Family

ID=16828254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22536887A Pending JPS6469903A (en) 1987-09-10 1987-09-10 Method for calculating center of cross mark

Country Status (1)

Country Link
JP (1) JPS6469903A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5640241A (en) * 1994-02-23 1997-06-17 Kabushikikaisha Wacom Light spot position measuring method of detecting one-dimensional position by two-dimensional sensor
JP2008241255A (en) * 2007-03-23 2008-10-09 Sumitomo Heavy Ind Ltd Method of detecting alignment mark position and laser machining device using method thereof
JP2011047674A (en) * 2009-08-25 2011-03-10 Nec Engineering Ltd Device and method for detecting center of cross pattern

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS603504A (en) * 1983-06-22 1985-01-09 Sumitomo Bakelite Co Ltd Detector for positioning

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS603504A (en) * 1983-06-22 1985-01-09 Sumitomo Bakelite Co Ltd Detector for positioning

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5640241A (en) * 1994-02-23 1997-06-17 Kabushikikaisha Wacom Light spot position measuring method of detecting one-dimensional position by two-dimensional sensor
JP2008241255A (en) * 2007-03-23 2008-10-09 Sumitomo Heavy Ind Ltd Method of detecting alignment mark position and laser machining device using method thereof
JP2011047674A (en) * 2009-08-25 2011-03-10 Nec Engineering Ltd Device and method for detecting center of cross pattern

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