JPS646748A - Analysis of sulfur in semiconductor material - Google Patents

Analysis of sulfur in semiconductor material

Info

Publication number
JPS646748A
JPS646748A JP16091287A JP16091287A JPS646748A JP S646748 A JPS646748 A JP S646748A JP 16091287 A JP16091287 A JP 16091287A JP 16091287 A JP16091287 A JP 16091287A JP S646748 A JPS646748 A JP S646748A
Authority
JP
Japan
Prior art keywords
sample
added
hydrogen sulfide
heating
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16091287A
Other languages
Japanese (ja)
Inventor
Akira Okada
Yukari Yokote
Koichi Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP16091287A priority Critical patent/JPS646748A/en
Publication of JPS646748A publication Critical patent/JPS646748A/en
Pending legal-status Critical Current

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  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

PURPOSE:To achieve a quantitative analysis of a trace of S in a short time, by a method wherein a sample to be analyzed is taken onto a high-melting point metal boat and an oxidizing or reducing agent is added thereto to separate S as hydrogen sulfide by heating and S is introduced into an argon plasma to determine it from intensity of excitation emission. CONSTITUTION:A sample to be analyzed is taken onto a boat made of a high melting point metal such as W and Mo, an oxidizing agent such as orthophosphoric acid and potassium bichromate is added thereto and the sample is melted by heating upto 200-400 deg.C. Then, a reducing agent such as metal Sn is added to the sample to separate S in the sample as hydrogen sulfide by heating upto 200-400 deg.C. The hydrogen sulfide is introduced into an ICP emission analyzer with an inert gas such as Ar as carrier and emission in observed at any wavelength of 180.7, 182.0 or 182.6nm with a spectroscope purged with the inert gas such as Ar to analyze S in material. This eliminates spraying of an aqueous solution required as in the conventional method, thereby enabling expectation of a rise in sensitivity with a high plasma temperature.
JP16091287A 1987-06-30 1987-06-30 Analysis of sulfur in semiconductor material Pending JPS646748A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16091287A JPS646748A (en) 1987-06-30 1987-06-30 Analysis of sulfur in semiconductor material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16091287A JPS646748A (en) 1987-06-30 1987-06-30 Analysis of sulfur in semiconductor material

Publications (1)

Publication Number Publication Date
JPS646748A true JPS646748A (en) 1989-01-11

Family

ID=15725006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16091287A Pending JPS646748A (en) 1987-06-30 1987-06-30 Analysis of sulfur in semiconductor material

Country Status (1)

Country Link
JP (1) JPS646748A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1181547A4 (en) * 1999-03-22 2007-10-03 Risatec Pty Ltd Apparatus for analysing reduced inorganic sulfur
WO2013105947A1 (en) * 2012-01-11 2013-07-18 E. I. Du Pont De Nemours And Company Method for determining sulfur content in fibers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1181547A4 (en) * 1999-03-22 2007-10-03 Risatec Pty Ltd Apparatus for analysing reduced inorganic sulfur
WO2013105947A1 (en) * 2012-01-11 2013-07-18 E. I. Du Pont De Nemours And Company Method for determining sulfur content in fibers

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