JPS6466814A - Manufacture of thin film magnetic head - Google Patents

Manufacture of thin film magnetic head

Info

Publication number
JPS6466814A
JPS6466814A JP22206087A JP22206087A JPS6466814A JP S6466814 A JPS6466814 A JP S6466814A JP 22206087 A JP22206087 A JP 22206087A JP 22206087 A JP22206087 A JP 22206087A JP S6466814 A JPS6466814 A JP S6466814A
Authority
JP
Japan
Prior art keywords
electrode
protection film
film
manufacture
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22206087A
Other languages
Japanese (ja)
Inventor
Eiichi Nagao
Susumu Odera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP22206087A priority Critical patent/JPS6466814A/en
Publication of JPS6466814A publication Critical patent/JPS6466814A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent the peeling-off of an electrode part or the generation of a cavity (crack), due to a grinding work by forming a lead electrode after forming a protection film on a lead conductor. CONSTITUTION:Since the protection film 17 is formed on the lead conductor 12, and after etching the prescribed part of the protection film 17 chemically, the electrode part 19 is formed by an electrolytic plating method on the exposed part of the substrate metallic film 13 by using a patterned photoresist film 14 as a mask, a grinding process is not necessitated, and the thickness of the protection film 17 can be made thin. Thus, since the thickness of the electrode 19 can be made thinner than the protection film 17, the rationalization of production can be attained as well. Furthermore, an advantage such that the electrode part 19 is not subjected to mechanical grinding or the cavity does not exist and so on, is obtained, and the electrode superior in mechanical strength or corrosion resistance can be obtained.
JP22206087A 1987-09-07 1987-09-07 Manufacture of thin film magnetic head Pending JPS6466814A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22206087A JPS6466814A (en) 1987-09-07 1987-09-07 Manufacture of thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22206087A JPS6466814A (en) 1987-09-07 1987-09-07 Manufacture of thin film magnetic head

Publications (1)

Publication Number Publication Date
JPS6466814A true JPS6466814A (en) 1989-03-13

Family

ID=16776477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22206087A Pending JPS6466814A (en) 1987-09-07 1987-09-07 Manufacture of thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS6466814A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0744819A (en) * 1993-07-22 1995-02-14 Internatl Business Mach Corp <Ibm> Manufacture of magnetic thin- film head
JP2008226306A (en) * 2007-03-09 2008-09-25 Tdk Corp Contact forming method for thin-film structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0744819A (en) * 1993-07-22 1995-02-14 Internatl Business Mach Corp <Ibm> Manufacture of magnetic thin- film head
JP2008226306A (en) * 2007-03-09 2008-09-25 Tdk Corp Contact forming method for thin-film structure

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