JPS6465461A - Optical waveguide flow velocity sensor - Google Patents
Optical waveguide flow velocity sensorInfo
- Publication number
- JPS6465461A JPS6465461A JP62221558A JP22155887A JPS6465461A JP S6465461 A JPS6465461 A JP S6465461A JP 62221558 A JP62221558 A JP 62221558A JP 22155887 A JP22155887 A JP 22155887A JP S6465461 A JPS6465461 A JP S6465461A
- Authority
- JP
- Japan
- Prior art keywords
- waveguides
- fluid
- waveguide
- flow velocity
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Volume Flow (AREA)
Abstract
PURPOSE:To measure various kinds of fluid by measuring a flow velocity by utilizing a phase difference output based upon variation in the temperature difference between waveguides. CONSTITUTION:A substrate 1 is provided with the optical waveguides 2a and 2b and the waveguide 2a is heated by a heater 6. Then light such as a laser light beam which is made incident from the optical waveguide 3a is branched at a point P to travels to the optical waveguides 2a and 2b, and reflected by mirrors 4 and 5 to come together at the branch point P, and part of it is projected through the waveguide 3b and photodetected by a photodetector 8 through a mirror 7. Here, the waveguide 2a is heated by the heater 6 and the optical path length is varied by the heating. Consequently, the waveguides 2a and 2b has a difference in optical path length, and a phase difference is generated between the light beams of both waveguides to cause interference, which is detected by a photodetector 8. Here, when fluid such as gas is brought into contact with the substrate 1, heat exchange with the fluid is caused to vary the temperature difference between both waveguides, and the phase difference between the waveguides varies correspondingly. Consequently, when the kind of the fluid is already known, the flow velocity is found from the output of the photodetector 8.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62221558A JPS6465461A (en) | 1987-09-04 | 1987-09-04 | Optical waveguide flow velocity sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62221558A JPS6465461A (en) | 1987-09-04 | 1987-09-04 | Optical waveguide flow velocity sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6465461A true JPS6465461A (en) | 1989-03-10 |
Family
ID=16768607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62221558A Pending JPS6465461A (en) | 1987-09-04 | 1987-09-04 | Optical waveguide flow velocity sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6465461A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5227001A (en) * | 1990-10-19 | 1993-07-13 | Integrated Process Equipment Corporation | Integrated dry-wet semiconductor layer removal apparatus and method |
-
1987
- 1987-09-04 JP JP62221558A patent/JPS6465461A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5227001A (en) * | 1990-10-19 | 1993-07-13 | Integrated Process Equipment Corporation | Integrated dry-wet semiconductor layer removal apparatus and method |
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