JPS6465461A - Optical waveguide flow velocity sensor - Google Patents

Optical waveguide flow velocity sensor

Info

Publication number
JPS6465461A
JPS6465461A JP62221558A JP22155887A JPS6465461A JP S6465461 A JPS6465461 A JP S6465461A JP 62221558 A JP62221558 A JP 62221558A JP 22155887 A JP22155887 A JP 22155887A JP S6465461 A JPS6465461 A JP S6465461A
Authority
JP
Japan
Prior art keywords
waveguides
fluid
waveguide
flow velocity
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62221558A
Other languages
Japanese (ja)
Inventor
Masayuki Izutsu
Tadashi Sueda
Masashi Okawa
Kunio Asai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tonen General Sekiyu KK
Original Assignee
Toa Nenryo Kogyyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toa Nenryo Kogyyo KK filed Critical Toa Nenryo Kogyyo KK
Priority to JP62221558A priority Critical patent/JPS6465461A/en
Publication of JPS6465461A publication Critical patent/JPS6465461A/en
Pending legal-status Critical Current

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  • Measuring Volume Flow (AREA)

Abstract

PURPOSE:To measure various kinds of fluid by measuring a flow velocity by utilizing a phase difference output based upon variation in the temperature difference between waveguides. CONSTITUTION:A substrate 1 is provided with the optical waveguides 2a and 2b and the waveguide 2a is heated by a heater 6. Then light such as a laser light beam which is made incident from the optical waveguide 3a is branched at a point P to travels to the optical waveguides 2a and 2b, and reflected by mirrors 4 and 5 to come together at the branch point P, and part of it is projected through the waveguide 3b and photodetected by a photodetector 8 through a mirror 7. Here, the waveguide 2a is heated by the heater 6 and the optical path length is varied by the heating. Consequently, the waveguides 2a and 2b has a difference in optical path length, and a phase difference is generated between the light beams of both waveguides to cause interference, which is detected by a photodetector 8. Here, when fluid such as gas is brought into contact with the substrate 1, heat exchange with the fluid is caused to vary the temperature difference between both waveguides, and the phase difference between the waveguides varies correspondingly. Consequently, when the kind of the fluid is already known, the flow velocity is found from the output of the photodetector 8.
JP62221558A 1987-09-04 1987-09-04 Optical waveguide flow velocity sensor Pending JPS6465461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62221558A JPS6465461A (en) 1987-09-04 1987-09-04 Optical waveguide flow velocity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62221558A JPS6465461A (en) 1987-09-04 1987-09-04 Optical waveguide flow velocity sensor

Publications (1)

Publication Number Publication Date
JPS6465461A true JPS6465461A (en) 1989-03-10

Family

ID=16768607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62221558A Pending JPS6465461A (en) 1987-09-04 1987-09-04 Optical waveguide flow velocity sensor

Country Status (1)

Country Link
JP (1) JPS6465461A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227001A (en) * 1990-10-19 1993-07-13 Integrated Process Equipment Corporation Integrated dry-wet semiconductor layer removal apparatus and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227001A (en) * 1990-10-19 1993-07-13 Integrated Process Equipment Corporation Integrated dry-wet semiconductor layer removal apparatus and method

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