JPS646515A - Porous static pressure guide - Google Patents

Porous static pressure guide

Info

Publication number
JPS646515A
JPS646515A JP15973787A JP15973787A JPS646515A JP S646515 A JPS646515 A JP S646515A JP 15973787 A JP15973787 A JP 15973787A JP 15973787 A JP15973787 A JP 15973787A JP S646515 A JPS646515 A JP S646515A
Authority
JP
Japan
Prior art keywords
plating
porous substance
passage
resistance
holds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15973787A
Other languages
Japanese (ja)
Other versions
JPH0730795B2 (en
Inventor
Munenori Kanai
Sunao Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP62159737A priority Critical patent/JPH0730795B2/en
Priority to US07/095,038 priority patent/US4793201A/en
Priority to DE8787113143T priority patent/DE3778156D1/en
Priority to DE3750904T priority patent/DE3750904T2/en
Priority to EP90250344A priority patent/EP0427363B1/en
Priority to EP87113143A priority patent/EP0297164B1/en
Priority to EP90250345A priority patent/EP0429155B1/en
Priority to DE3750961T priority patent/DE3750961T2/en
Publication of JPS646515A publication Critical patent/JPS646515A/en
Publication of JPH0730795B2 publication Critical patent/JPH0730795B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Chemically Coating (AREA)
  • Sliding-Contact Bearings (AREA)

Abstract

PURPOSE:To make it possible to obtain desired resistance of a passage by providing electroless plating matted material in porous substance used for a static guide which holds a space between a male screw and a female screw. CONSTITUTION:Porous substance used for a static guide which holds a space between a male screw and a female screw is subjected to electroless nickel plating. Plating liquid passing the inside of the porous substance flows from a flow-in side 39 to a flow-out side 40 to minimize the resistance of a passage. Consequently, the plating liquid concentrates in a rather thick fluid passage 37 in the porous substance and a plating film 41 is formed into further deep portion, but in rather a narrow fluid passage 38 it is limited to a surface layer plating film 42 so that fluid resistance is equalized. The passage resistance of the porous substance can be accurately controlled by adjusting the quantity of the entire plating.
JP62159737A 1987-06-29 1987-06-29 Method for manufacturing porous static pressure guide Expired - Lifetime JPH0730795B2 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP62159737A JPH0730795B2 (en) 1987-06-29 1987-06-29 Method for manufacturing porous static pressure guide
US07/095,038 US4793201A (en) 1987-06-29 1987-09-09 Porous static pressure guide
DE8787113143T DE3778156D1 (en) 1987-06-29 1987-09-09 GUIDE WORKING WITH STATIC PRESSURE MADE OF POROUS MATERIAL.
DE3750904T DE3750904T2 (en) 1987-06-29 1987-09-09 Feed device.
EP90250344A EP0427363B1 (en) 1987-06-29 1987-09-09 Static pressure lead screw
EP87113143A EP0297164B1 (en) 1987-06-29 1987-09-09 Porous static pressure guide
EP90250345A EP0429155B1 (en) 1987-06-29 1987-09-09 Feed mechanism
DE3750961T DE3750961T2 (en) 1987-06-29 1987-09-09 Screw drive guide working with static pressure.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62159737A JPH0730795B2 (en) 1987-06-29 1987-06-29 Method for manufacturing porous static pressure guide

Publications (2)

Publication Number Publication Date
JPS646515A true JPS646515A (en) 1989-01-11
JPH0730795B2 JPH0730795B2 (en) 1995-04-10

Family

ID=15700167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62159737A Expired - Lifetime JPH0730795B2 (en) 1987-06-29 1987-06-29 Method for manufacturing porous static pressure guide

Country Status (1)

Country Link
JP (1) JPH0730795B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004349576A (en) * 2003-05-23 2004-12-09 Canon Inc Stage system, static-pressure bearing device, method for positioning, exposure system, and method of manufacturing device
JP2011179577A (en) * 2010-02-26 2011-09-15 Oiles Corp Cam follower
JP2012159103A (en) * 2011-01-31 2012-08-23 Kyocera Corp Hydrostatic slider

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100871278B1 (en) * 2007-07-02 2008-11-28 경상대학교산학협력단 Aerostatic bearing spindle system using unidirectional porous metal

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50127288A (en) * 1974-03-25 1975-10-07
JPS5313330A (en) * 1976-07-22 1978-02-06 Sony Corp Broad band resonance circuit
JPS5356447A (en) * 1976-11-01 1978-05-22 Nippon Telegr & Teleph Corp <Ntt> Porous bearing
JPS571170A (en) * 1980-06-04 1982-01-06 Hitachi Ltd Test operation method for elevator and its device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50127288A (en) * 1974-03-25 1975-10-07
JPS5313330A (en) * 1976-07-22 1978-02-06 Sony Corp Broad band resonance circuit
JPS5356447A (en) * 1976-11-01 1978-05-22 Nippon Telegr & Teleph Corp <Ntt> Porous bearing
JPS571170A (en) * 1980-06-04 1982-01-06 Hitachi Ltd Test operation method for elevator and its device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004349576A (en) * 2003-05-23 2004-12-09 Canon Inc Stage system, static-pressure bearing device, method for positioning, exposure system, and method of manufacturing device
JP2011179577A (en) * 2010-02-26 2011-09-15 Oiles Corp Cam follower
JP2012159103A (en) * 2011-01-31 2012-08-23 Kyocera Corp Hydrostatic slider

Also Published As

Publication number Publication date
JPH0730795B2 (en) 1995-04-10

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