JPS646515A - Porous static pressure guide - Google Patents
Porous static pressure guideInfo
- Publication number
- JPS646515A JPS646515A JP15973787A JP15973787A JPS646515A JP S646515 A JPS646515 A JP S646515A JP 15973787 A JP15973787 A JP 15973787A JP 15973787 A JP15973787 A JP 15973787A JP S646515 A JPS646515 A JP S646515A
- Authority
- JP
- Japan
- Prior art keywords
- plating
- porous substance
- passage
- resistance
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Chemically Coating (AREA)
- Sliding-Contact Bearings (AREA)
Abstract
PURPOSE:To make it possible to obtain desired resistance of a passage by providing electroless plating matted material in porous substance used for a static guide which holds a space between a male screw and a female screw. CONSTITUTION:Porous substance used for a static guide which holds a space between a male screw and a female screw is subjected to electroless nickel plating. Plating liquid passing the inside of the porous substance flows from a flow-in side 39 to a flow-out side 40 to minimize the resistance of a passage. Consequently, the plating liquid concentrates in a rather thick fluid passage 37 in the porous substance and a plating film 41 is formed into further deep portion, but in rather a narrow fluid passage 38 it is limited to a surface layer plating film 42 so that fluid resistance is equalized. The passage resistance of the porous substance can be accurately controlled by adjusting the quantity of the entire plating.
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62159737A JPH0730795B2 (en) | 1987-06-29 | 1987-06-29 | Method for manufacturing porous static pressure guide |
US07/095,038 US4793201A (en) | 1987-06-29 | 1987-09-09 | Porous static pressure guide |
DE8787113143T DE3778156D1 (en) | 1987-06-29 | 1987-09-09 | GUIDE WORKING WITH STATIC PRESSURE MADE OF POROUS MATERIAL. |
DE3750904T DE3750904T2 (en) | 1987-06-29 | 1987-09-09 | Feed device. |
EP90250344A EP0427363B1 (en) | 1987-06-29 | 1987-09-09 | Static pressure lead screw |
EP87113143A EP0297164B1 (en) | 1987-06-29 | 1987-09-09 | Porous static pressure guide |
EP90250345A EP0429155B1 (en) | 1987-06-29 | 1987-09-09 | Feed mechanism |
DE3750961T DE3750961T2 (en) | 1987-06-29 | 1987-09-09 | Screw drive guide working with static pressure. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62159737A JPH0730795B2 (en) | 1987-06-29 | 1987-06-29 | Method for manufacturing porous static pressure guide |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS646515A true JPS646515A (en) | 1989-01-11 |
JPH0730795B2 JPH0730795B2 (en) | 1995-04-10 |
Family
ID=15700167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62159737A Expired - Lifetime JPH0730795B2 (en) | 1987-06-29 | 1987-06-29 | Method for manufacturing porous static pressure guide |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0730795B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004349576A (en) * | 2003-05-23 | 2004-12-09 | Canon Inc | Stage system, static-pressure bearing device, method for positioning, exposure system, and method of manufacturing device |
JP2011179577A (en) * | 2010-02-26 | 2011-09-15 | Oiles Corp | Cam follower |
JP2012159103A (en) * | 2011-01-31 | 2012-08-23 | Kyocera Corp | Hydrostatic slider |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100871278B1 (en) * | 2007-07-02 | 2008-11-28 | 경상대학교산학협력단 | Aerostatic bearing spindle system using unidirectional porous metal |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50127288A (en) * | 1974-03-25 | 1975-10-07 | ||
JPS5313330A (en) * | 1976-07-22 | 1978-02-06 | Sony Corp | Broad band resonance circuit |
JPS5356447A (en) * | 1976-11-01 | 1978-05-22 | Nippon Telegr & Teleph Corp <Ntt> | Porous bearing |
JPS571170A (en) * | 1980-06-04 | 1982-01-06 | Hitachi Ltd | Test operation method for elevator and its device |
-
1987
- 1987-06-29 JP JP62159737A patent/JPH0730795B2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50127288A (en) * | 1974-03-25 | 1975-10-07 | ||
JPS5313330A (en) * | 1976-07-22 | 1978-02-06 | Sony Corp | Broad band resonance circuit |
JPS5356447A (en) * | 1976-11-01 | 1978-05-22 | Nippon Telegr & Teleph Corp <Ntt> | Porous bearing |
JPS571170A (en) * | 1980-06-04 | 1982-01-06 | Hitachi Ltd | Test operation method for elevator and its device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004349576A (en) * | 2003-05-23 | 2004-12-09 | Canon Inc | Stage system, static-pressure bearing device, method for positioning, exposure system, and method of manufacturing device |
JP2011179577A (en) * | 2010-02-26 | 2011-09-15 | Oiles Corp | Cam follower |
JP2012159103A (en) * | 2011-01-31 | 2012-08-23 | Kyocera Corp | Hydrostatic slider |
Also Published As
Publication number | Publication date |
---|---|
JPH0730795B2 (en) | 1995-04-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080410 Year of fee payment: 13 |