JPS6464226A - Supporter of boat - Google Patents
Supporter of boatInfo
- Publication number
- JPS6464226A JPS6464226A JP62220929A JP22092987A JPS6464226A JP S6464226 A JPS6464226 A JP S6464226A JP 62220929 A JP62220929 A JP 62220929A JP 22092987 A JP22092987 A JP 22092987A JP S6464226 A JPS6464226 A JP S6464226A
- Authority
- JP
- Japan
- Prior art keywords
- stages
- sections
- boat
- pushing
- changed over
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To automate the exchange of stages and the exchange of fixing bodies by respectively mounting pairs of the stages and the fixing bodies in an exchangeable manner. CONSTITUTION:When boats are exchanged, stages 12a, 12b as boat 9 contact sections for a boat supporter 11 positioning and supporting a previous boat 9 and pushing sections 42a, 43a for a fixing body 37 are changed over because a reaction gas also adhered on the stages 12a, 12b and the pushing sections 42a, 43a by contacts with the boat 9. The stages are changed over in such a manner that base plates 13a, 13b and the stages 12a, 12b are elevated or lowered relatively-for example, the stages 13a, 13b are lifted by driving a cylinder 34 and set where higher than the height of the stages 12a, 12b. The pushing sections are changed over to pushing sections 42b, 43b by turning a rotary solenoid 41. When the pushing sections 42a, 43a are changed over to 42b, 43b at that time, the pushing sections 42b, 43b are also constituted so as to be abutted against higher positions only by distance sections higher than the normal state because the pushing sections are set where higher than the normal state, and the next boat can be positioned and supported under the same conditions apparently.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62220929A JPH0622226B2 (en) | 1987-09-02 | 1987-09-02 | Boat support equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62220929A JPH0622226B2 (en) | 1987-09-02 | 1987-09-02 | Boat support equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6464226A true JPS6464226A (en) | 1989-03-10 |
JPH0622226B2 JPH0622226B2 (en) | 1994-03-23 |
Family
ID=16758766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62220929A Expired - Lifetime JPH0622226B2 (en) | 1987-09-02 | 1987-09-02 | Boat support equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0622226B2 (en) |
-
1987
- 1987-09-02 JP JP62220929A patent/JPH0622226B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0622226B2 (en) | 1994-03-23 |
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