JPS6464226A - Supporter of boat - Google Patents

Supporter of boat

Info

Publication number
JPS6464226A
JPS6464226A JP62220929A JP22092987A JPS6464226A JP S6464226 A JPS6464226 A JP S6464226A JP 62220929 A JP62220929 A JP 62220929A JP 22092987 A JP22092987 A JP 22092987A JP S6464226 A JPS6464226 A JP S6464226A
Authority
JP
Japan
Prior art keywords
stages
sections
boat
pushing
changed over
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62220929A
Other languages
Japanese (ja)
Other versions
JPH0622226B2 (en
Inventor
Mizuki Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Yamanashi Ltd
Original Assignee
Tokyo Electron Yamanashi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Yamanashi Ltd filed Critical Tokyo Electron Yamanashi Ltd
Priority to JP62220929A priority Critical patent/JPH0622226B2/en
Publication of JPS6464226A publication Critical patent/JPS6464226A/en
Publication of JPH0622226B2 publication Critical patent/JPH0622226B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To automate the exchange of stages and the exchange of fixing bodies by respectively mounting pairs of the stages and the fixing bodies in an exchangeable manner. CONSTITUTION:When boats are exchanged, stages 12a, 12b as boat 9 contact sections for a boat supporter 11 positioning and supporting a previous boat 9 and pushing sections 42a, 43a for a fixing body 37 are changed over because a reaction gas also adhered on the stages 12a, 12b and the pushing sections 42a, 43a by contacts with the boat 9. The stages are changed over in such a manner that base plates 13a, 13b and the stages 12a, 12b are elevated or lowered relatively-for example, the stages 13a, 13b are lifted by driving a cylinder 34 and set where higher than the height of the stages 12a, 12b. The pushing sections are changed over to pushing sections 42b, 43b by turning a rotary solenoid 41. When the pushing sections 42a, 43a are changed over to 42b, 43b at that time, the pushing sections 42b, 43b are also constituted so as to be abutted against higher positions only by distance sections higher than the normal state because the pushing sections are set where higher than the normal state, and the next boat can be positioned and supported under the same conditions apparently.
JP62220929A 1987-09-02 1987-09-02 Boat support equipment Expired - Lifetime JPH0622226B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62220929A JPH0622226B2 (en) 1987-09-02 1987-09-02 Boat support equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62220929A JPH0622226B2 (en) 1987-09-02 1987-09-02 Boat support equipment

Publications (2)

Publication Number Publication Date
JPS6464226A true JPS6464226A (en) 1989-03-10
JPH0622226B2 JPH0622226B2 (en) 1994-03-23

Family

ID=16758766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62220929A Expired - Lifetime JPH0622226B2 (en) 1987-09-02 1987-09-02 Boat support equipment

Country Status (1)

Country Link
JP (1) JPH0622226B2 (en)

Also Published As

Publication number Publication date
JPH0622226B2 (en) 1994-03-23

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