JPS6463916A - Measuring instrument for dynamic surface tilt angle of rotary polygon mirror - Google Patents

Measuring instrument for dynamic surface tilt angle of rotary polygon mirror

Info

Publication number
JPS6463916A
JPS6463916A JP17411487A JP17411487A JPS6463916A JP S6463916 A JPS6463916 A JP S6463916A JP 17411487 A JP17411487 A JP 17411487A JP 17411487 A JP17411487 A JP 17411487A JP S6463916 A JPS6463916 A JP S6463916A
Authority
JP
Japan
Prior art keywords
polygon mirror
rotary polygon
tilt angle
amplitude
dynamic surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17411487A
Other languages
English (en)
Inventor
Takahiro Tsukuda
Yoshio Ikui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP17411487A priority Critical patent/JPS6463916A/ja
Publication of JPS6463916A publication Critical patent/JPS6463916A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP17411487A 1987-05-14 1987-07-13 Measuring instrument for dynamic surface tilt angle of rotary polygon mirror Pending JPS6463916A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17411487A JPS6463916A (en) 1987-05-14 1987-07-13 Measuring instrument for dynamic surface tilt angle of rotary polygon mirror

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11600287 1987-05-14
JP17411487A JPS6463916A (en) 1987-05-14 1987-07-13 Measuring instrument for dynamic surface tilt angle of rotary polygon mirror

Publications (1)

Publication Number Publication Date
JPS6463916A true JPS6463916A (en) 1989-03-09

Family

ID=26454405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17411487A Pending JPS6463916A (en) 1987-05-14 1987-07-13 Measuring instrument for dynamic surface tilt angle of rotary polygon mirror

Country Status (1)

Country Link
JP (1) JPS6463916A (ja)

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