JPS6461914A - Photoelectronic image transfer device - Google Patents

Abstract

PURPOSE:To avoid wasteful transfer, and to inhibit the generation of loss by receiving the irradiation of photoelectrons E from a mask so as to contain the whole region of a specified transfer region in a mask and detecting the distribution of photoelectron intensity in the transfer region by a two-dimensional electron-ray detecting means. CONSTITUTION:A two-dimensional electron ray detecting means 10 is composed of a fluorescent screen 11, a TV camera 12 and a lens system 13 optically coupling both the screen 11 and the camera 12. The fluorescent screen 11 is arranged at the position of a wafer 2 at the time of transfer, is irradiated with photoelectrons E from a mask 4 so as to include the whole region of a specified transfer region in the mask 4, and emits fluorescence in intensity distribution corresponding to the intensity distribution of photoelectrons E, and the TV camera 12 converts the intensity distribution into a picture signal. The picture signal of a reference corresponding to the intensity distribution of the reference, which will be changed, is acquired previously only by the shape and arrangement of the pattern of the mask 4, and the picture signal from the TV camera 12 and the picture signal of the reference are compared. Accordingly, the nonuniformity of the distribution of a photoconductive film 4c can be detected by the difference of both picture signals.