JPS6457718A - Bounce preventive structure of rotor - Google Patents

Abstract

PURPOSE:To obtain a stamper having a small error rate by constituting a wall surface in the periphery of a rotor by laminating a plurality of belleville-spring-shaped ring bodies with tapered surfaces and curved surfaces at proper intervals while suction ports directly coupled with a decompression chamber are formed near the outermost peripheral section of the ring bodies or in the regions. CONSTITUTION:An on-off valve 16 for a drainage port is closed, and suction is started from a suction port shaped to a member 11 by proper pressure difference by a pressure regulator 15. A treatment liquid discharged from a nozzle 7 drops onto a glass original plate 1, flows toward an outer circumference on a plate surface by the action of centrifugal force, and lastly is separated from the glass original plate 1 and is forwarded toward ring bodies 14 laminated. The treatment liquid passes among the clearances of the ring bodies 14, collides with the tapered surfaces of the ring bodies, and flows along the tapered surfaces by the viscosity of the treatment liquid and a suction effect from the outer circumferential section. One part of the treatment liquid separated from the glass original plate 1 collides with the end faces of the inner circumferences of the ring bodies 14, but the ring bodies 14 are thinned while the end faces of the inner circumferences are sharpened, thus avoiding the bounce of the treatment liquid.