JPS6457689A - Device for exchanging gas section of gas laser oscillator - Google Patents

Device for exchanging gas section of gas laser oscillator

Info

Publication number
JPS6457689A
JPS6457689A JP21297887A JP21297887A JPS6457689A JP S6457689 A JPS6457689 A JP S6457689A JP 21297887 A JP21297887 A JP 21297887A JP 21297887 A JP21297887 A JP 21297887A JP S6457689 A JPS6457689 A JP S6457689A
Authority
JP
Japan
Prior art keywords
gas
tube
pressure
gas laser
exchange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21297887A
Other languages
Japanese (ja)
Inventor
Yasuo Onishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP21297887A priority Critical patent/JPS6457689A/en
Publication of JPS6457689A publication Critical patent/JPS6457689A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To make it possible to perform a partial exchange of the gas quantitatively in a gas laser tube even when a gas laser oscillator is operated for a long time by a method wherein the pressure in the gas laser tube in motion is detected and a control means for exchanging the gas in the gas laser tube on the basis of the pressure value is provided. CONSTITUTION:A gas pressure sensor 5 for detecting a gas pressure in a gas laser tube 1, an exhaust valve 10, which is mounted to the tube 1 and exhausts gas in the tube 1 to the outside of the tube, and a gas supply valve 8, which is mounted to the tube 1 and supplies gas into the interior of the tube 1, are provided. Moreover, a control means 7; which computes the exchange amount of gas in the tube 1 on the basis of a pressure value in the tube 1 in motion, which is obtained from the above sensor 5, and opens and shuts the above valves 10 and 8 to exchange gas of an amount equivalent to the value; is provided. Thereby, the partial exchange of gas can be always performed quantitatively without being affected by an increase in the gas pressure in the tube due to a temperature rise in the gas laser tube.
JP21297887A 1987-08-28 1987-08-28 Device for exchanging gas section of gas laser oscillator Pending JPS6457689A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21297887A JPS6457689A (en) 1987-08-28 1987-08-28 Device for exchanging gas section of gas laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21297887A JPS6457689A (en) 1987-08-28 1987-08-28 Device for exchanging gas section of gas laser oscillator

Publications (1)

Publication Number Publication Date
JPS6457689A true JPS6457689A (en) 1989-03-03

Family

ID=16631447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21297887A Pending JPS6457689A (en) 1987-08-28 1987-08-28 Device for exchanging gas section of gas laser oscillator

Country Status (1)

Country Link
JP (1) JPS6457689A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0926785A1 (en) * 1997-12-27 1999-06-30 Trumpf GmbH & Co Method to control a laser gas exchange device connected to a gas discharge space of a gas laser apparatus and device for carrying out this method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0926785A1 (en) * 1997-12-27 1999-06-30 Trumpf GmbH & Co Method to control a laser gas exchange device connected to a gas discharge space of a gas laser apparatus and device for carrying out this method

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