JPS56100334A - Detector for gas leakage - Google Patents

Detector for gas leakage

Info

Publication number
JPS56100334A
JPS56100334A JP377380A JP377380A JPS56100334A JP S56100334 A JPS56100334 A JP S56100334A JP 377380 A JP377380 A JP 377380A JP 377380 A JP377380 A JP 377380A JP S56100334 A JPS56100334 A JP S56100334A
Authority
JP
Japan
Prior art keywords
nitrogen gas
temperature
chamber
detector
supply path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP377380A
Other languages
Japanese (ja)
Inventor
Masamitsu Iwanaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP377380A priority Critical patent/JPS56100334A/en
Publication of JPS56100334A publication Critical patent/JPS56100334A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material

Abstract

PURPOSE:To keep nitrogen gas temperature without affected by the season, by providing a heater and temperature sensor on the way of a nitrogen gas supply path to a chamber and a leakage detector and controlling the heater according to the detected temperature. CONSTITUTION:In detecting gas leakage, a discharge pump 13 is operated and air in the chamber 1 is discharged, then a three-way valve 12 is switched to receive nitrogen gas in the chamber 1 via a nitrogen gas supply path 15 and to supply nitrogen gas also to the leakage detector 4 via a nitrogen gas supply path 8. At the supply of gas, the temperature of nitrogen gas flowing to the chamber 1 and the detector 4 is detected at temperature sensors 17, 10, and the heat dissipation of the heaters 16, 9 is changed by the detected temperature and a given temperature of nitrogen gas is supplied to increase the measuring accuracy.
JP377380A 1980-01-17 1980-01-17 Detector for gas leakage Pending JPS56100334A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP377380A JPS56100334A (en) 1980-01-17 1980-01-17 Detector for gas leakage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP377380A JPS56100334A (en) 1980-01-17 1980-01-17 Detector for gas leakage

Publications (1)

Publication Number Publication Date
JPS56100334A true JPS56100334A (en) 1981-08-12

Family

ID=11566491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP377380A Pending JPS56100334A (en) 1980-01-17 1980-01-17 Detector for gas leakage

Country Status (1)

Country Link
JP (1) JPS56100334A (en)

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