JPS6457637U - - Google Patents

Info

Publication number
JPS6457637U
JPS6457637U JP15023387U JP15023387U JPS6457637U JP S6457637 U JPS6457637 U JP S6457637U JP 15023387 U JP15023387 U JP 15023387U JP 15023387 U JP15023387 U JP 15023387U JP S6457637 U JPS6457637 U JP S6457637U
Authority
JP
Japan
Prior art keywords
crystal
quartz tube
substrate
heat sink
stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15023387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH034028Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15023387U priority Critical patent/JPH034028Y2/ja
Publication of JPS6457637U publication Critical patent/JPS6457637U/ja
Application granted granted Critical
Publication of JPH034028Y2 publication Critical patent/JPH034028Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP15023387U 1987-09-30 1987-09-30 Expired JPH034028Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15023387U JPH034028Y2 (enrdf_load_stackoverflow) 1987-09-30 1987-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15023387U JPH034028Y2 (enrdf_load_stackoverflow) 1987-09-30 1987-09-30

Publications (2)

Publication Number Publication Date
JPS6457637U true JPS6457637U (enrdf_load_stackoverflow) 1989-04-10
JPH034028Y2 JPH034028Y2 (enrdf_load_stackoverflow) 1991-02-01

Family

ID=31423190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15023387U Expired JPH034028Y2 (enrdf_load_stackoverflow) 1987-09-30 1987-09-30

Country Status (1)

Country Link
JP (1) JPH034028Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH034028Y2 (enrdf_load_stackoverflow) 1991-02-01

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