JPS6456987A - Turbo-vacuum pump - Google Patents
Turbo-vacuum pumpInfo
- Publication number
- JPS6456987A JPS6456987A JP21008887A JP21008887A JPS6456987A JP S6456987 A JPS6456987 A JP S6456987A JP 21008887 A JP21008887 A JP 21008887A JP 21008887 A JP21008887 A JP 21008887A JP S6456987 A JPS6456987 A JP S6456987A
- Authority
- JP
- Japan
- Prior art keywords
- shaft seal
- line
- atmosphere
- pressure
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To prevent oil from reverse flow into a pump flow path by detecting the pressure in the inside of a supply line, when it decreases to a preset value or less, and releasing an atmosphere introducing means introducing the atmosphere to the supply line which supplies shaft seal gas to a shaft seal mechanism. CONSTITUTION:In a housing 1 having a suction port 2 of gas and its delivery port 3, a pump rotatably houses a rotor 4 turned by a motor 5 while provides a shaft seal mechanism 6 in a partition partitioning a pump part, through which a rotary shaft integrally formed with the rotor 4 penetrates, and a driving part. Shaft seal gas is supplied to this shaft seal mechanism 6 from a shaft seal gas supply line 7. Here providing a relief valve 8, serving as the atmosphere introducing means, in the line 7, the pressure in the line 7, when it decreases to a preset value or less, is detected, and opening the relief valve 8 to introduce the atmosphere into the line 7, oil is prevented from reverse flow into a pump flow path by preventing the pressure in the line 7 from decreasing to a negative pressure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21008887A JPS6456987A (en) | 1987-08-26 | 1987-08-26 | Turbo-vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21008887A JPS6456987A (en) | 1987-08-26 | 1987-08-26 | Turbo-vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6456987A true JPS6456987A (en) | 1989-03-03 |
Family
ID=16583621
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21008887A Pending JPS6456987A (en) | 1987-08-26 | 1987-08-26 | Turbo-vacuum pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6456987A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5051060A (en) * | 1989-07-20 | 1991-09-24 | Leybold Aktiengesellschaft | Gas friction pump having an outlet-side helical stage |
-
1987
- 1987-08-26 JP JP21008887A patent/JPS6456987A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5051060A (en) * | 1989-07-20 | 1991-09-24 | Leybold Aktiengesellschaft | Gas friction pump having an outlet-side helical stage |
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