JPS6456987A - Turbo-vacuum pump - Google Patents

Turbo-vacuum pump

Info

Publication number
JPS6456987A
JPS6456987A JP21008887A JP21008887A JPS6456987A JP S6456987 A JPS6456987 A JP S6456987A JP 21008887 A JP21008887 A JP 21008887A JP 21008887 A JP21008887 A JP 21008887A JP S6456987 A JPS6456987 A JP S6456987A
Authority
JP
Japan
Prior art keywords
shaft seal
line
atmosphere
pressure
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21008887A
Other languages
Japanese (ja)
Inventor
Akira Nishiuchi
Takashi Nagaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP21008887A priority Critical patent/JPS6456987A/en
Publication of JPS6456987A publication Critical patent/JPS6456987A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent oil from reverse flow into a pump flow path by detecting the pressure in the inside of a supply line, when it decreases to a preset value or less, and releasing an atmosphere introducing means introducing the atmosphere to the supply line which supplies shaft seal gas to a shaft seal mechanism. CONSTITUTION:In a housing 1 having a suction port 2 of gas and its delivery port 3, a pump rotatably houses a rotor 4 turned by a motor 5 while provides a shaft seal mechanism 6 in a partition partitioning a pump part, through which a rotary shaft integrally formed with the rotor 4 penetrates, and a driving part. Shaft seal gas is supplied to this shaft seal mechanism 6 from a shaft seal gas supply line 7. Here providing a relief valve 8, serving as the atmosphere introducing means, in the line 7, the pressure in the line 7, when it decreases to a preset value or less, is detected, and opening the relief valve 8 to introduce the atmosphere into the line 7, oil is prevented from reverse flow into a pump flow path by preventing the pressure in the line 7 from decreasing to a negative pressure.
JP21008887A 1987-08-26 1987-08-26 Turbo-vacuum pump Pending JPS6456987A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21008887A JPS6456987A (en) 1987-08-26 1987-08-26 Turbo-vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21008887A JPS6456987A (en) 1987-08-26 1987-08-26 Turbo-vacuum pump

Publications (1)

Publication Number Publication Date
JPS6456987A true JPS6456987A (en) 1989-03-03

Family

ID=16583621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21008887A Pending JPS6456987A (en) 1987-08-26 1987-08-26 Turbo-vacuum pump

Country Status (1)

Country Link
JP (1) JPS6456987A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5051060A (en) * 1989-07-20 1991-09-24 Leybold Aktiengesellschaft Gas friction pump having an outlet-side helical stage

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5051060A (en) * 1989-07-20 1991-09-24 Leybold Aktiengesellschaft Gas friction pump having an outlet-side helical stage

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