JPS6456865A - High-hardness coating film and its production - Google Patents
High-hardness coating film and its productionInfo
- Publication number
- JPS6456865A JPS6456865A JP21481687A JP21481687A JPS6456865A JP S6456865 A JPS6456865 A JP S6456865A JP 21481687 A JP21481687 A JP 21481687A JP 21481687 A JP21481687 A JP 21481687A JP S6456865 A JPS6456865 A JP S6456865A
- Authority
- JP
- Japan
- Prior art keywords
- coating film
- gaseous
- ratio
- metallic
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
PURPOSE:To obtain the title coating film with improved hardness by forming a counter cathode with the metallic Ti and metallic Hf in a specified ratio, using a mixture of the gaseous N2 and gaseous NH3 in a specified ratio, and carrying out sputtering under specified conditions. CONSTITUTION:The counter cathode (about 99.9% purity) is formed with metallic Ti as the Ti source and metallic Hf as the Hf source with the area ratio to obtain a coating film having a desired Ti/Hf ratio, or the counter cathode is formed from an alloy contg. the Ti source and Hf source in the Ti/Hf ratio to obtain a coating film having the desired Ti/Hf ratio. The nitriding gas consists of gaseous N2 and gaseous NH3, and the flow rate and/or concn. of the gaseous N2 and/or gaseous NH3 are controlled to obviate the deficiency of the nitrogen atom. in the coating film. Under such a constitution, sputtering is carried out at the substrate temp. of 200-700 deg.C and with the sputtering power of 200-2,000W and the total gas pressure of 0.1-100Pa, and a high- hardness coating film shown by (Ti1-xHfx)N (where 0<x<0.7) is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21481687A JPS6456865A (en) | 1987-08-28 | 1987-08-28 | High-hardness coating film and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21481687A JPS6456865A (en) | 1987-08-28 | 1987-08-28 | High-hardness coating film and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6456865A true JPS6456865A (en) | 1989-03-03 |
Family
ID=16661998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21481687A Pending JPS6456865A (en) | 1987-08-28 | 1987-08-28 | High-hardness coating film and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6456865A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5110677A (en) * | 1974-07-17 | 1976-01-28 | Nippon Steel Corp | Haikibutsushoriro |
| JPS5558364A (en) * | 1978-10-27 | 1980-05-01 | Hitachi Metals Ltd | Ultra hard alloy coated composite compounds |
| JPS55120937A (en) * | 1979-03-12 | 1980-09-17 | Hitachi Metals Ltd | Cutting tool |
| JPS5625959A (en) * | 1979-08-07 | 1981-03-12 | Hitachi Metals Ltd | Surface covered sintered hard alloy member |
-
1987
- 1987-08-28 JP JP21481687A patent/JPS6456865A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5110677A (en) * | 1974-07-17 | 1976-01-28 | Nippon Steel Corp | Haikibutsushoriro |
| JPS5558364A (en) * | 1978-10-27 | 1980-05-01 | Hitachi Metals Ltd | Ultra hard alloy coated composite compounds |
| JPS55120937A (en) * | 1979-03-12 | 1980-09-17 | Hitachi Metals Ltd | Cutting tool |
| JPS5625959A (en) * | 1979-08-07 | 1981-03-12 | Hitachi Metals Ltd | Surface covered sintered hard alloy member |
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