JPS645639U - - Google Patents
Info
- Publication number
- JPS645639U JPS645639U JP9785387U JP9785387U JPS645639U JP S645639 U JPS645639 U JP S645639U JP 9785387 U JP9785387 U JP 9785387U JP 9785387 U JP9785387 U JP 9785387U JP S645639 U JPS645639 U JP S645639U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- inner pipe
- piping
- harmful
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 11
- 231100000614 poison Toxicity 0.000 claims description 3
- 230000007096 poisonous effect Effects 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 2
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 239000002341 toxic gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Thermal Insulation (AREA)
- Rigid Pipes And Flexible Pipes (AREA)
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987097853U JPH08980Y2 (ja) | 1987-06-25 | 1987-06-25 | 有害・有毒ガス配管装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987097853U JPH08980Y2 (ja) | 1987-06-25 | 1987-06-25 | 有害・有毒ガス配管装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS645639U true JPS645639U (ru) | 1989-01-12 |
| JPH08980Y2 JPH08980Y2 (ja) | 1996-01-17 |
Family
ID=31323606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987097853U Expired - Lifetime JPH08980Y2 (ja) | 1987-06-25 | 1987-06-25 | 有害・有毒ガス配管装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08980Y2 (ru) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0647269A (ja) * | 1992-07-06 | 1994-02-22 | Ebara Infilco Co Ltd | 真空処理装置 |
| JP2001053066A (ja) * | 1999-05-28 | 2001-02-23 | Tokyo Electron Ltd | オゾン処理装置およびその方法 |
| JP2004508681A (ja) * | 2000-09-05 | 2004-03-18 | アクセリス テクノロジーズ インコーポレーテッド | イオン注入機のための大量ガス送出システム |
| JP2021044385A (ja) * | 2019-09-11 | 2021-03-18 | 東京エレクトロン株式会社 | 熱媒体循環システム及び基板処理装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100801843B1 (ko) * | 2006-08-22 | 2008-02-11 | 동부일렉트로닉스 주식회사 | 가스 처리 장치 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6286598U (ru) * | 1985-11-20 | 1987-06-02 |
-
1987
- 1987-06-25 JP JP1987097853U patent/JPH08980Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6286598U (ru) * | 1985-11-20 | 1987-06-02 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0647269A (ja) * | 1992-07-06 | 1994-02-22 | Ebara Infilco Co Ltd | 真空処理装置 |
| JP2001053066A (ja) * | 1999-05-28 | 2001-02-23 | Tokyo Electron Ltd | オゾン処理装置およびその方法 |
| JP2004508681A (ja) * | 2000-09-05 | 2004-03-18 | アクセリス テクノロジーズ インコーポレーテッド | イオン注入機のための大量ガス送出システム |
| JP2021044385A (ja) * | 2019-09-11 | 2021-03-18 | 東京エレクトロン株式会社 | 熱媒体循環システム及び基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08980Y2 (ja) | 1996-01-17 |