JPS6455484A - Vacuum valve - Google Patents

Vacuum valve

Info

Publication number
JPS6455484A
JPS6455484A JP20887287A JP20887287A JPS6455484A JP S6455484 A JPS6455484 A JP S6455484A JP 20887287 A JP20887287 A JP 20887287A JP 20887287 A JP20887287 A JP 20887287A JP S6455484 A JPS6455484 A JP S6455484A
Authority
JP
Japan
Prior art keywords
vacuum pump
connection port
connection
pressure chamber
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20887287A
Other languages
Japanese (ja)
Inventor
Eiji Nishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NISHIHARA Manufacturing CO Ltd
NISHIHARA SEISAKUSHO KK
Original Assignee
NISHIHARA Manufacturing CO Ltd
NISHIHARA SEISAKUSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NISHIHARA Manufacturing CO Ltd, NISHIHARA SEISAKUSHO KK filed Critical NISHIHARA Manufacturing CO Ltd
Priority to JP20887287A priority Critical patent/JPS6455484A/en
Publication of JPS6455484A publication Critical patent/JPS6455484A/en
Pending legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)

Abstract

PURPOSE:To make a main body compact by setting a difference between the area of a pressure chamber and the connection port to a vacuum pump and permitting and shutting off the communication between both the connection ports to a vacuum pump and a chamber with a diaphragm. CONSTITUTION:A pressure chamber 4 which has larger diameter than the connection port 2 to a vacuum pump P and functions to communicate both the connection ports 2 and 3 is formed between the connection port 2 of a connection pipe to the vacuum pump P and the connection port to the chamber C. Both a valve body 5a which opens and closes the connection port 2 only to the vacuum pump and a diaphragm 5 which permits and inhibits communication between both the connection ports 2 and 3 are integrally mounted inside the pressure chamber 4. A communication pipe 7 is mounted between both the pressure chamber 4 and the connection port 2 to the vacuum pump via a solenoid valve E.
JP20887287A 1987-08-22 1987-08-22 Vacuum valve Pending JPS6455484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20887287A JPS6455484A (en) 1987-08-22 1987-08-22 Vacuum valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20887287A JPS6455484A (en) 1987-08-22 1987-08-22 Vacuum valve

Publications (1)

Publication Number Publication Date
JPS6455484A true JPS6455484A (en) 1989-03-02

Family

ID=16563515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20887287A Pending JPS6455484A (en) 1987-08-22 1987-08-22 Vacuum valve

Country Status (1)

Country Link
JP (1) JPS6455484A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5653251A (en) * 1995-03-06 1997-08-05 Reseal International Limited Partnership Vacuum actuated sheath valve
JP2016084895A (en) * 2014-10-28 2016-05-19 株式会社清光社 Valve device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5653251A (en) * 1995-03-06 1997-08-05 Reseal International Limited Partnership Vacuum actuated sheath valve
WO1998029786A1 (en) * 1995-03-06 1998-07-09 Reseal International Limited Partnership Vacuum actuated sheath valve
JP2016084895A (en) * 2014-10-28 2016-05-19 株式会社清光社 Valve device

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