JPS645444U - - Google Patents
Info
- Publication number
- JPS645444U JPS645444U JP9983987U JP9983987U JPS645444U JP S645444 U JPS645444 U JP S645444U JP 9983987 U JP9983987 U JP 9983987U JP 9983987 U JP9983987 U JP 9983987U JP S645444 U JPS645444 U JP S645444U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- pattern
- formed surface
- periphery
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 4
- 239000007779 soft material Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9983987U JPS645444U (nl) | 1987-06-29 | 1987-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9983987U JPS645444U (nl) | 1987-06-29 | 1987-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS645444U true JPS645444U (nl) | 1989-01-12 |
Family
ID=31327370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9983987U Pending JPS645444U (nl) | 1987-06-29 | 1987-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS645444U (nl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04103404U (ja) * | 1991-02-14 | 1992-09-07 | 三菱農機株式会社 | ロータリー耕耘作業機 |
-
1987
- 1987-06-29 JP JP9983987U patent/JPS645444U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04103404U (ja) * | 1991-02-14 | 1992-09-07 | 三菱農機株式会社 | ロータリー耕耘作業機 |