JPS645434U - - Google Patents

Info

Publication number
JPS645434U
JPS645434U JP1987098526U JP9852687U JPS645434U JP S645434 U JPS645434 U JP S645434U JP 1987098526 U JP1987098526 U JP 1987098526U JP 9852687 U JP9852687 U JP 9852687U JP S645434 U JPS645434 U JP S645434U
Authority
JP
Japan
Prior art keywords
support plate
ray
exposure mask
window
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987098526U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530347Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987098526U priority Critical patent/JPH0530347Y2/ja
Publication of JPS645434U publication Critical patent/JPS645434U/ja
Application granted granted Critical
Publication of JPH0530347Y2 publication Critical patent/JPH0530347Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987098526U 1987-06-29 1987-06-29 Expired - Lifetime JPH0530347Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987098526U JPH0530347Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-29 1987-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987098526U JPH0530347Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-29 1987-06-29

Publications (2)

Publication Number Publication Date
JPS645434U true JPS645434U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-01-12
JPH0530347Y2 JPH0530347Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-03

Family

ID=31324878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987098526U Expired - Lifetime JPH0530347Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-29 1987-06-29

Country Status (1)

Country Link
JP (1) JPH0530347Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0530347Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-03

Similar Documents

Publication Publication Date Title
JPS645434U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0284607U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61173942U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6341157U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0356127U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6185850U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63185224U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6249101U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH03114845U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0312244U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6171429U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH03103444U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0237868U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0221650U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62123648U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH02138416U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61104452U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62191685U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62157095U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH049051U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0330425U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63151160U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62118461U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61137948U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6214451U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)