JPS645431U - - Google Patents

Info

Publication number
JPS645431U
JPS645431U JP9906287U JP9906287U JPS645431U JP S645431 U JPS645431 U JP S645431U JP 9906287 U JP9906287 U JP 9906287U JP 9906287 U JP9906287 U JP 9906287U JP S645431 U JPS645431 U JP S645431U
Authority
JP
Japan
Prior art keywords
substrate holder
holder
forming apparatus
film forming
cvd film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9906287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9906287U priority Critical patent/JPS645431U/ja
Publication of JPS645431U publication Critical patent/JPS645431U/ja
Pending legal-status Critical Current

Links

JP9906287U 1987-06-26 1987-06-26 Pending JPS645431U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9906287U JPS645431U (US20100056889A1-20100304-C00004.png) 1987-06-26 1987-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9906287U JPS645431U (US20100056889A1-20100304-C00004.png) 1987-06-26 1987-06-26

Publications (1)

Publication Number Publication Date
JPS645431U true JPS645431U (US20100056889A1-20100304-C00004.png) 1989-01-12

Family

ID=31325875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9906287U Pending JPS645431U (US20100056889A1-20100304-C00004.png) 1987-06-26 1987-06-26

Country Status (1)

Country Link
JP (1) JPS645431U (US20100056889A1-20100304-C00004.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62188308A (ja) * 1986-02-14 1987-08-17 Hitachi Micro Comput Eng Ltd 支持電極

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62188308A (ja) * 1986-02-14 1987-08-17 Hitachi Micro Comput Eng Ltd 支持電極

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