JPS6454045U - - Google Patents
Info
- Publication number
- JPS6454045U JPS6454045U JP1987150656U JP15065687U JPS6454045U JP S6454045 U JPS6454045 U JP S6454045U JP 1987150656 U JP1987150656 U JP 1987150656U JP 15065687 U JP15065687 U JP 15065687U JP S6454045 U JPS6454045 U JP S6454045U
- Authority
- JP
- Japan
- Prior art keywords
- alignment
- distance
- dies
- alignment mark
- reticle used
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987150656U JPS6454045U (zh) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987150656U JPS6454045U (zh) | 1987-09-30 | 1987-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6454045U true JPS6454045U (zh) | 1989-04-04 |
Family
ID=31423995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987150656U Pending JPS6454045U (zh) | 1987-09-30 | 1987-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6454045U (zh) |
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1987
- 1987-09-30 JP JP1987150656U patent/JPS6454045U/ja active Pending