JPS6454045U - - Google Patents

Info

Publication number
JPS6454045U
JPS6454045U JP1987150656U JP15065687U JPS6454045U JP S6454045 U JPS6454045 U JP S6454045U JP 1987150656 U JP1987150656 U JP 1987150656U JP 15065687 U JP15065687 U JP 15065687U JP S6454045 U JPS6454045 U JP S6454045U
Authority
JP
Japan
Prior art keywords
alignment
distance
dies
alignment mark
reticle used
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987150656U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987150656U priority Critical patent/JPS6454045U/ja
Publication of JPS6454045U publication Critical patent/JPS6454045U/ja
Pending legal-status Critical Current

Links

JP1987150656U 1987-09-30 1987-09-30 Pending JPS6454045U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987150656U JPS6454045U (US07534539-20090519-C00280.png) 1987-09-30 1987-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987150656U JPS6454045U (US07534539-20090519-C00280.png) 1987-09-30 1987-09-30

Publications (1)

Publication Number Publication Date
JPS6454045U true JPS6454045U (US07534539-20090519-C00280.png) 1989-04-04

Family

ID=31423995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987150656U Pending JPS6454045U (US07534539-20090519-C00280.png) 1987-09-30 1987-09-30

Country Status (1)

Country Link
JP (1) JPS6454045U (US07534539-20090519-C00280.png)

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