JPS6453753U - - Google Patents
Info
- Publication number
- JPS6453753U JPS6453753U JP15074887U JP15074887U JPS6453753U JP S6453753 U JPS6453753 U JP S6453753U JP 15074887 U JP15074887 U JP 15074887U JP 15074887 U JP15074887 U JP 15074887U JP S6453753 U JPS6453753 U JP S6453753U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- target
- back plate
- cart
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 4
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15074887U JPH065415Y2 (ja) | 1987-09-30 | 1987-09-30 | スパッタリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15074887U JPH065415Y2 (ja) | 1987-09-30 | 1987-09-30 | スパッタリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6453753U true JPS6453753U (enExample) | 1989-04-03 |
| JPH065415Y2 JPH065415Y2 (ja) | 1994-02-09 |
Family
ID=31424165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15074887U Expired - Lifetime JPH065415Y2 (ja) | 1987-09-30 | 1987-09-30 | スパッタリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH065415Y2 (enExample) |
-
1987
- 1987-09-30 JP JP15074887U patent/JPH065415Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH065415Y2 (ja) | 1994-02-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6453753U (enExample) | ||
| JPS6325324U (enExample) | ||
| JPS63183262U (enExample) | ||
| JPS61123870U (enExample) | ||
| JPS60184578U (ja) | パチンコ機における駆動用ソレノイドの取付装置 | |
| JPS6188775U (enExample) | ||
| JPS63131069U (enExample) | ||
| JPS5960073U (ja) | 車両の転向制動機作動装置 | |
| JPS59187867U (ja) | 自動販売機 | |
| JPH0365388U (enExample) | ||
| JPS5820922U (ja) | 農用トラクタ−のクラッチハウジングの構造 | |
| JPH0234577U (enExample) | ||
| JPS6311794U (enExample) | ||
| JPS5857037U (ja) | 誤動作防止機構 | |
| JPS58152036U (ja) | カ−ラジオ | |
| JPS63183261U (enExample) | ||
| JPS6410777U (enExample) | ||
| JPS61202090U (enExample) | ||
| JPH0320473U (enExample) | ||
| JPS5980648U (ja) | 暖房装置 | |
| JPS641500U (enExample) | ||
| JPS58155712U (ja) | 表示素子取付構造 | |
| JPS61153944U (enExample) | ||
| JPS6325838U (enExample) | ||
| JPS645291U (enExample) |