JPS6453102A - Positioning device - Google Patents

Positioning device

Info

Publication number
JPS6453102A
JPS6453102A JP62208264A JP20826487A JPS6453102A JP S6453102 A JPS6453102 A JP S6453102A JP 62208264 A JP62208264 A JP 62208264A JP 20826487 A JP20826487 A JP 20826487A JP S6453102 A JPS6453102 A JP S6453102A
Authority
JP
Japan
Prior art keywords
temperature variation
temperature
value
base line
central control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62208264A
Other languages
Japanese (ja)
Inventor
Shoichi Tanimoto
Shigeo Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62208264A priority Critical patent/JPS6453102A/en
Publication of JPS6453102A publication Critical patent/JPS6453102A/en
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To excellently and accurately position an object even in case of temperature variation by detecting the temperature variation of a support part for a projection means and an alignment means and measuring a mechanical interval, and correcting a last measured value. CONSTITUTION:A base line value before the temperature variation, initial values of measured temperature by temperature sensors TS1 and TS2, the standard value of temperature variation for correcting the base line value are stored in a central control part 6 respectively. The temperature sensors TS1 and TS2 fitted to the support part 34 and an alignment detection system 36 measure temperature and input their values to the central control part 46, and the temperature variation is found by using the previously stored initial values and compared with a prescribed value. When the temperature variation is smaller than the prescribed value, the base line value stored in the central control part 46 updated and a new base line value is utilized after the update to position a reticle R and a wafer W.
JP62208264A 1987-08-24 1987-08-24 Positioning device Pending JPS6453102A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62208264A JPS6453102A (en) 1987-08-24 1987-08-24 Positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62208264A JPS6453102A (en) 1987-08-24 1987-08-24 Positioning device

Publications (1)

Publication Number Publication Date
JPS6453102A true JPS6453102A (en) 1989-03-01

Family

ID=16553359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62208264A Pending JPS6453102A (en) 1987-08-24 1987-08-24 Positioning device

Country Status (1)

Country Link
JP (1) JPS6453102A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009508137A (en) * 2005-09-13 2009-02-26 スレッテモエン，グドムン Optomechanical position measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009508137A (en) * 2005-09-13 2009-02-26 スレッテモエン，グドムン Optomechanical position measuring device

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