JPS64523U - - Google Patents
Info
- Publication number
- JPS64523U JPS64523U JP9583187U JP9583187U JPS64523U JP S64523 U JPS64523 U JP S64523U JP 9583187 U JP9583187 U JP 9583187U JP 9583187 U JP9583187 U JP 9583187U JP S64523 U JPS64523 U JP S64523U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- gas introduction
- introduction means
- transfer mechanism
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 239000004809 Teflon Substances 0.000 claims description 2
- 229920006362 Teflon® Polymers 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9583187U JPS64523U (fr) | 1987-06-22 | 1987-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9583187U JPS64523U (fr) | 1987-06-22 | 1987-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS64523U true JPS64523U (fr) | 1989-01-05 |
Family
ID=30960895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9583187U Pending JPS64523U (fr) | 1987-06-22 | 1987-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS64523U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007517649A (ja) * | 2004-01-16 | 2007-07-05 | アトテック・ドイチュラント・ゲーエムベーハー | 処理媒体での被処理物処理のためのノズル配列及び方法 |
-
1987
- 1987-06-22 JP JP9583187U patent/JPS64523U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007517649A (ja) * | 2004-01-16 | 2007-07-05 | アトテック・ドイチュラント・ゲーエムベーハー | 処理媒体での被処理物処理のためのノズル配列及び方法 |