JPS6452233U - - Google Patents
Info
- Publication number
- JPS6452233U JPS6452233U JP14795887U JP14795887U JPS6452233U JP S6452233 U JPS6452233 U JP S6452233U JP 14795887 U JP14795887 U JP 14795887U JP 14795887 U JP14795887 U JP 14795887U JP S6452233 U JPS6452233 U JP S6452233U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- window
- quartz glass
- dry etching
- spectroscopic analysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 claims description 2
- 238000004611 spectroscopical analysis Methods 0.000 claims 2
- 238000004993 emission spectroscopy Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14795887U JPS6452233U (ko) | 1987-09-28 | 1987-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14795887U JPS6452233U (ko) | 1987-09-28 | 1987-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6452233U true JPS6452233U (ko) | 1989-03-31 |
Family
ID=31418838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14795887U Pending JPS6452233U (ko) | 1987-09-28 | 1987-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6452233U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7254098B2 (en) | 2002-10-25 | 2007-08-07 | Samsung Electronics Co., Ltd. | CD-DVD compatible optical pickup and optical recording and/or reproducing apparatus using the same |
-
1987
- 1987-09-28 JP JP14795887U patent/JPS6452233U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7254098B2 (en) | 2002-10-25 | 2007-08-07 | Samsung Electronics Co., Ltd. | CD-DVD compatible optical pickup and optical recording and/or reproducing apparatus using the same |
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