JPS6451844U - - Google Patents
Info
- Publication number
- JPS6451844U JPS6451844U JP14791487U JP14791487U JPS6451844U JP S6451844 U JPS6451844 U JP S6451844U JP 14791487 U JP14791487 U JP 14791487U JP 14791487 U JP14791487 U JP 14791487U JP S6451844 U JPS6451844 U JP S6451844U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- silicon
- sensor chip
- fixing portion
- fixing part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 230000000704 physical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14791487U JPS6451844U (is) | 1987-09-28 | 1987-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14791487U JPS6451844U (is) | 1987-09-28 | 1987-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6451844U true JPS6451844U (is) | 1989-03-30 |
Family
ID=31418762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14791487U Pending JPS6451844U (is) | 1987-09-28 | 1987-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6451844U (is) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009041465A1 (ja) * | 2007-09-25 | 2009-04-02 | Alps Electric Co., Ltd. | 半導体圧力センサ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57190242A (en) * | 1981-05-20 | 1982-11-22 | Hitachi Ltd | Pressure sensor |
-
1987
- 1987-09-28 JP JP14791487U patent/JPS6451844U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57190242A (en) * | 1981-05-20 | 1982-11-22 | Hitachi Ltd | Pressure sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009041465A1 (ja) * | 2007-09-25 | 2009-04-02 | Alps Electric Co., Ltd. | 半導体圧力センサ |