JPS6451661U - - Google Patents
Info
- Publication number
- JPS6451661U JPS6451661U JP14484387U JP14484387U JPS6451661U JP S6451661 U JPS6451661 U JP S6451661U JP 14484387 U JP14484387 U JP 14484387U JP 14484387 U JP14484387 U JP 14484387U JP S6451661 U JPS6451661 U JP S6451661U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- catch
- roller
- arm
- pivoted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14484387U JPS6451661U (enExample) | 1987-09-22 | 1987-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14484387U JPS6451661U (enExample) | 1987-09-22 | 1987-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6451661U true JPS6451661U (enExample) | 1989-03-30 |
Family
ID=31412904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14484387U Pending JPS6451661U (enExample) | 1987-09-22 | 1987-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6451661U (enExample) |
-
1987
- 1987-09-22 JP JP14484387U patent/JPS6451661U/ja active Pending