JPS62123855U - - Google Patents
Info
- Publication number
- JPS62123855U JPS62123855U JP1986010979U JP1097986U JPS62123855U JP S62123855 U JPS62123855 U JP S62123855U JP 1986010979 U JP1986010979 U JP 1986010979U JP 1097986 U JP1097986 U JP 1097986U JP S62123855 U JPS62123855 U JP S62123855U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- counter electrode
- angle
- counter
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 8
- 238000004458 analytical method Methods 0.000 claims 1
- 238000004993 emission spectroscopy Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986010979U JPS62123855U (enExample) | 1986-01-30 | 1986-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986010979U JPS62123855U (enExample) | 1986-01-30 | 1986-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62123855U true JPS62123855U (enExample) | 1987-08-06 |
Family
ID=30797781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986010979U Pending JPS62123855U (enExample) | 1986-01-30 | 1986-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62123855U (enExample) |
-
1986
- 1986-01-30 JP JP1986010979U patent/JPS62123855U/ja active Pending