JPS645115U - - Google Patents
Info
- Publication number
- JPS645115U JPS645115U JP9916887U JP9916887U JPS645115U JP S645115 U JPS645115 U JP S645115U JP 9916887 U JP9916887 U JP 9916887U JP 9916887 U JP9916887 U JP 9916887U JP S645115 U JPS645115 U JP S645115U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- bimorph
- quantity sensor
- mechanical quantity
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9916887U JPS645115U (fr) | 1987-06-26 | 1987-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9916887U JPS645115U (fr) | 1987-06-26 | 1987-06-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS645115U true JPS645115U (fr) | 1989-01-12 |
Family
ID=31326074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9916887U Pending JPS645115U (fr) | 1987-06-26 | 1987-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS645115U (fr) |
-
1987
- 1987-06-26 JP JP9916887U patent/JPS645115U/ja active Pending