JPS6450238U - - Google Patents
Info
- Publication number
- JPS6450238U JPS6450238U JP14672187U JP14672187U JPS6450238U JP S6450238 U JPS6450238 U JP S6450238U JP 14672187 U JP14672187 U JP 14672187U JP 14672187 U JP14672187 U JP 14672187U JP S6450238 U JPS6450238 U JP S6450238U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- section
- clamp
- halves
- transfer machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Warehouses Or Storage Devices (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14672187U JPS6450238U (pt-PT) | 1987-09-25 | 1987-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14672187U JPS6450238U (pt-PT) | 1987-09-25 | 1987-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6450238U true JPS6450238U (pt-PT) | 1989-03-28 |
Family
ID=31416477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14672187U Pending JPS6450238U (pt-PT) | 1987-09-25 | 1987-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6450238U (pt-PT) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6062477A (ja) * | 1983-09-16 | 1985-04-10 | 株式会社日立製作所 | ウェハ−カセット搬送ロボット |
| JPS60229268A (ja) * | 1984-04-27 | 1985-11-14 | Nitsukiyou Seisakusho:Kk | ビデオデイスク自動再生装置におけるデイスク搬送装置 |
-
1987
- 1987-09-25 JP JP14672187U patent/JPS6450238U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6062477A (ja) * | 1983-09-16 | 1985-04-10 | 株式会社日立製作所 | ウェハ−カセット搬送ロボット |
| JPS60229268A (ja) * | 1984-04-27 | 1985-11-14 | Nitsukiyou Seisakusho:Kk | ビデオデイスク自動再生装置におけるデイスク搬送装置 |