JPS6449842U - - Google Patents
Info
- Publication number
- JPS6449842U JPS6449842U JP1987143491U JP14349187U JPS6449842U JP S6449842 U JPS6449842 U JP S6449842U JP 1987143491 U JP1987143491 U JP 1987143491U JP 14349187 U JP14349187 U JP 14349187U JP S6449842 U JPS6449842 U JP S6449842U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- dimensions
- resist pattern
- mask pattern
- pattern corresponding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987143491U JPS6449842U (da) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987143491U JPS6449842U (da) | 1987-09-18 | 1987-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6449842U true JPS6449842U (da) | 1989-03-28 |
Family
ID=31410366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987143491U Pending JPS6449842U (da) | 1987-09-18 | 1987-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6449842U (da) |
-
1987
- 1987-09-18 JP JP1987143491U patent/JPS6449842U/ja active Pending