JPS6448803A - Photosensitive resin composition - Google Patents
Photosensitive resin compositionInfo
- Publication number
- JPS6448803A JPS6448803A JP20608487A JP20608487A JPS6448803A JP S6448803 A JPS6448803 A JP S6448803A JP 20608487 A JP20608487 A JP 20608487A JP 20608487 A JP20608487 A JP 20608487A JP S6448803 A JPS6448803 A JP S6448803A
- Authority
- JP
- Japan
- Prior art keywords
- acridyl
- group
- photosensitive resin
- photopolymn
- contg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Polymerisation Methods In General (AREA)
Abstract
PURPOSE:To obtain the title compsn. comprising a specified acridyl side group- contg. photopolymn. initiator, a thermoplastic org. polymer and an ethylene- terminated photopolymerizable compd. and being highly photosensitive and free from solder melting after etching. CONSTITUTION:The title product is a photosensitive resin compsn. contg. a photopolymn. initiator A having a wt.-average MW of at least 320 and having an acridyl side group of the formula as shown [where R1-R8 are each H, a halogen, 1-8C alkyl or methoxy; X is a (substd.)arom. ring conjugated with an acridyl group] [e.g., 9-(p-n-hexylphenyl)acridine, etc.], and a photopolymerizable compd. C having at least one terminal ethylene group (e.g., trimethyloylpropane triacrylate, etc.). This comps. is highly photosensitive and is free from solder melting after etching, so that it can be used in forming a precision circuit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62206084A JP2570758B2 (en) | 1987-08-19 | 1987-08-19 | Photosensitive resin composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62206084A JP2570758B2 (en) | 1987-08-19 | 1987-08-19 | Photosensitive resin composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6448803A true JPS6448803A (en) | 1989-02-23 |
JP2570758B2 JP2570758B2 (en) | 1997-01-16 |
Family
ID=16517554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62206084A Expired - Fee Related JP2570758B2 (en) | 1987-08-19 | 1987-08-19 | Photosensitive resin composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2570758B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02226148A (en) * | 1988-12-22 | 1990-09-07 | Hoechst Ag | Photopolymerizing mixture and photopolymerizing copying material containing the same |
JPH03168749A (en) * | 1989-11-29 | 1991-07-22 | Hitachi Chem Co Ltd | Photopolymerizable composition and photopolymerizable element |
EP0503076A1 (en) * | 1990-09-28 | 1992-09-16 | Hitachi Chemical Co., Ltd. | Photopolymerizable composition and photopolymerizable element |
CN102341753A (en) * | 2009-03-13 | 2012-02-01 | 日立化成工业株式会社 | Photosensitive resin composition, and photosensitive element, resist pattern formation method and printed circuit board production method each utilizing same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63256602A (en) * | 1987-04-14 | 1988-10-24 | Hitachi Chem Co Ltd | Photopolymerizable composition |
-
1987
- 1987-08-19 JP JP62206084A patent/JP2570758B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63256602A (en) * | 1987-04-14 | 1988-10-24 | Hitachi Chem Co Ltd | Photopolymerizable composition |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02226148A (en) * | 1988-12-22 | 1990-09-07 | Hoechst Ag | Photopolymerizing mixture and photopolymerizing copying material containing the same |
JPH03168749A (en) * | 1989-11-29 | 1991-07-22 | Hitachi Chem Co Ltd | Photopolymerizable composition and photopolymerizable element |
EP0503076A1 (en) * | 1990-09-28 | 1992-09-16 | Hitachi Chemical Co., Ltd. | Photopolymerizable composition and photopolymerizable element |
EP0503076A4 (en) * | 1990-09-28 | 1993-02-24 | Hitachi Chemical Co., Ltd. | Photopolymerizable composition and photopolymerizable element |
CN102341753A (en) * | 2009-03-13 | 2012-02-01 | 日立化成工业株式会社 | Photosensitive resin composition, and photosensitive element, resist pattern formation method and printed circuit board production method each utilizing same |
JP5344034B2 (en) * | 2009-03-13 | 2013-11-20 | 日立化成株式会社 | Photosensitive resin composition, photosensitive element using the same, resist pattern forming method, and printed wiring board manufacturing method |
Also Published As
Publication number | Publication date |
---|---|
JP2570758B2 (en) | 1997-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |