JPS644876U - - Google Patents
Info
- Publication number
- JPS644876U JPS644876U JP9839887U JP9839887U JPS644876U JP S644876 U JPS644876 U JP S644876U JP 9839887 U JP9839887 U JP 9839887U JP 9839887 U JP9839887 U JP 9839887U JP S644876 U JPS644876 U JP S644876U
- Authority
- JP
- Japan
- Prior art keywords
- panel
- stage
- cryopump
- heat insulating
- insulating sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9839887U JPS644876U (it) | 1987-06-29 | 1987-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9839887U JPS644876U (it) | 1987-06-29 | 1987-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS644876U true JPS644876U (it) | 1989-01-12 |
Family
ID=31324624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9839887U Pending JPS644876U (it) | 1987-06-29 | 1987-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS644876U (it) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5027770U (it) * | 1973-07-06 | 1975-03-31 | ||
| JPS59165613A (ja) * | 1983-03-11 | 1984-09-18 | 松下電工株式会社 | 集成材の製法 |
-
1987
- 1987-06-29 JP JP9839887U patent/JPS644876U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5027770U (it) * | 1973-07-06 | 1975-03-31 | ||
| JPS59165613A (ja) * | 1983-03-11 | 1984-09-18 | 松下電工株式会社 | 集成材の製法 |
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