JPS6448354A - Ion beam generator - Google Patents

Ion beam generator

Info

Publication number
JPS6448354A
JPS6448354A JP62204482A JP20448287A JPS6448354A JP S6448354 A JPS6448354 A JP S6448354A JP 62204482 A JP62204482 A JP 62204482A JP 20448287 A JP20448287 A JP 20448287A JP S6448354 A JPS6448354 A JP S6448354A
Authority
JP
Japan
Prior art keywords
tip
ion beam
needle electrode
stabilized
comes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62204482A
Other languages
Japanese (ja)
Inventor
Takichi Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP62204482A priority Critical patent/JPS6448354A/en
Publication of JPS6448354A publication Critical patent/JPS6448354A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To secure such an ion beam stabilized in an ion current securable in a way of optimizing a flow rate of liquid metal by setting the form of a needle electrode tip down to a sectional area in proportion to length of the tip. CONSTITUTION:In case of an ion beam generator having a needle electrode which has an ion beam generated by impressing high voltage in a gap with a drawer electrode, each sectional area S is set down to such a form that comes to a linear functional proportion to a distance L from a tip. With this formation, a moving heating value of a needle electrode tip 11 comes to such one that is linearly proportioned to length of this tip 11, whereby flow resistance in liquid metal flowing on a surface of the needle electrode tip 11 is stabilized, thus an ion current can be stabilized.
JP62204482A 1987-08-18 1987-08-18 Ion beam generator Pending JPS6448354A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62204482A JPS6448354A (en) 1987-08-18 1987-08-18 Ion beam generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62204482A JPS6448354A (en) 1987-08-18 1987-08-18 Ion beam generator

Publications (1)

Publication Number Publication Date
JPS6448354A true JPS6448354A (en) 1989-02-22

Family

ID=16491255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62204482A Pending JPS6448354A (en) 1987-08-18 1987-08-18 Ion beam generator

Country Status (1)

Country Link
JP (1) JPS6448354A (en)

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