JPS6448135U - - Google Patents
Info
- Publication number
- JPS6448135U JPS6448135U JP14166587U JP14166587U JPS6448135U JP S6448135 U JPS6448135 U JP S6448135U JP 14166587 U JP14166587 U JP 14166587U JP 14166587 U JP14166587 U JP 14166587U JP S6448135 U JPS6448135 U JP S6448135U
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- sealing portion
- bubbler tube
- small holes
- tube according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims description 4
- 230000005587 bubbling Effects 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Description
第１図乃至第３図は、本考案の実施例に係るバ
ブラー管を用いたバブラ装置を示し、第２図はそ
の全体斜視図、第１図はその要部切欠き拡大断面
図、第３図はその作用を示す要部断面図である。
第４図は、従来技術の作用を示す要部断面図であ
る。
１：バブリングガス供給通路、２：焼結体、３
ａ：小孔、３：中空封止部。
1 to 3 show a bubbler device using a bubbler tube according to an embodiment of the present invention, FIG. 2 is a perspective view of the whole, FIG. The figure is a sectional view of a main part showing its effect.
FIG. 4 is a sectional view of a main part showing the effect of the prior art. 1: Bubbling gas supply passage, 2: Sintered body, 3
a: small hole, 3: hollow sealing part.
Claims (1)
小孔を穿設した中空封止部を設けるとともに、少
なくとも前記小孔を隠蔽する如く該封止部の表面
に焼結体を被覆した事を特徴とするバブラー管。 (2) 前記焼結体が石英ガラス製焼結体である実
用新案登録請求の範囲第１項記載のバブラー管。 (3) 前記中空封止部を膨出させてその表面に薄
肉の焼結体が形成されている実用新案登録請求の
範囲第１項記載のバブラー管。[Claims for Utility Model Registration] (1) A hollow sealing portion with a large number of small holes is provided on the tip side of the bubbling gas supply passage, and the surface of the sealing portion is formed so as to at least hide the small holes. A bubbler tube characterized by being coated with a sintered body. (2) The bubbler tube according to claim 1, wherein the sintered body is a sintered body made of quartz glass. (3) The bubbler tube according to claim 1, wherein the hollow sealing portion is bulged to form a thin sintered body on its surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14166587U JPH055940Y2 (en) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14166587U JPH055940Y2 (en) | 1987-09-18 | 1987-09-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6448135U true JPS6448135U (en) | 1989-03-24 |
| JPH055940Y2 JPH055940Y2 (en) | 1993-02-16 |
Family
ID=31406933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14166587U Expired - Lifetime JPH055940Y2 (en) | 1987-09-18 | 1987-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH055940Y2 (en) |
-
1987
- 1987-09-18 JP JP14166587U patent/JPH055940Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH055940Y2 (en) | 1993-02-16 |