JPS6448031U - - Google Patents
Info
- Publication number
- JPS6448031U JPS6448031U JP1987143115U JP14311587U JPS6448031U JP S6448031 U JPS6448031 U JP S6448031U JP 1987143115 U JP1987143115 U JP 1987143115U JP 14311587 U JP14311587 U JP 14311587U JP S6448031 U JPS6448031 U JP S6448031U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- support member
- switch
- elevating
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987143115U JPH0632683Y2 (ja) | 1987-09-21 | 1987-09-21 | 半導体ウエハ保持ボート位置監視装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987143115U JPH0632683Y2 (ja) | 1987-09-21 | 1987-09-21 | 半導体ウエハ保持ボート位置監視装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6448031U true JPS6448031U (enExample) | 1989-03-24 |
| JPH0632683Y2 JPH0632683Y2 (ja) | 1994-08-24 |
Family
ID=31409648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987143115U Expired - Lifetime JPH0632683Y2 (ja) | 1987-09-21 | 1987-09-21 | 半導体ウエハ保持ボート位置監視装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632683Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56173524U (enExample) * | 1980-05-23 | 1981-12-22 | ||
| JPS6168444U (enExample) * | 1984-10-12 | 1986-05-10 |
-
1987
- 1987-09-21 JP JP1987143115U patent/JPH0632683Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56173524U (enExample) * | 1980-05-23 | 1981-12-22 | ||
| JPS6168444U (enExample) * | 1984-10-12 | 1986-05-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632683Y2 (ja) | 1994-08-24 |