JPS6447045U - - Google Patents

Info

Publication number
JPS6447045U
JPS6447045U JP14193187U JP14193187U JPS6447045U JP S6447045 U JPS6447045 U JP S6447045U JP 14193187 U JP14193187 U JP 14193187U JP 14193187 U JP14193187 U JP 14193187U JP S6447045 U JPS6447045 U JP S6447045U
Authority
JP
Japan
Prior art keywords
wafer
storage device
transport
wafer storage
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14193187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14193187U priority Critical patent/JPS6447045U/ja
Publication of JPS6447045U publication Critical patent/JPS6447045U/ja
Pending legal-status Critical Current

Links

JP14193187U 1987-09-17 1987-09-17 Pending JPS6447045U (US06623731-20030923-C00052.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14193187U JPS6447045U (US06623731-20030923-C00052.png) 1987-09-17 1987-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14193187U JPS6447045U (US06623731-20030923-C00052.png) 1987-09-17 1987-09-17

Publications (1)

Publication Number Publication Date
JPS6447045U true JPS6447045U (US06623731-20030923-C00052.png) 1989-03-23

Family

ID=31407436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14193187U Pending JPS6447045U (US06623731-20030923-C00052.png) 1987-09-17 1987-09-17

Country Status (1)

Country Link
JP (1) JPS6447045U (US06623731-20030923-C00052.png)

Similar Documents

Publication Publication Date Title
US4907701A (en) Apparatus for inspecting the appearance of semiconductor devices
JPS6447045U (US06623731-20030923-C00052.png)
JPS59195740U (ja) リ−ドレスチツプキヤリヤテストハンドラ−
JPS634925U (US06623731-20030923-C00052.png)
JPH0648858Y2 (ja) ウエハ収納容器
JPS5351857A (en) Device for positioning spreader for container handling machine
JPS5972733U (ja) ウエハ搬送装置
JPS63122282U (US06623731-20030923-C00052.png)
JP2511321Y2 (ja) 収納容器搬送装置
JPH01162406U (US06623731-20030923-C00052.png)
JPS61123460U (US06623731-20030923-C00052.png)
JPS62106867U (US06623731-20030923-C00052.png)
JPS64516U (US06623731-20030923-C00052.png)
JPH0332428U (US06623731-20030923-C00052.png)
JPS61158809U (US06623731-20030923-C00052.png)
JPS6322738U (US06623731-20030923-C00052.png)
JPS6099203U (ja) ビン等の列数変換装置
JPS62133546U (US06623731-20030923-C00052.png)
JPS5827243U (ja) シ−ト搬送装置
JPS62104148U (US06623731-20030923-C00052.png)
JPS63116241U (US06623731-20030923-C00052.png)
JPS6390836U (US06623731-20030923-C00052.png)
JPS59130849U (ja) 板状材料の自動取出・積載装置
JPS6339942U (US06623731-20030923-C00052.png)
JPS58177885U (ja) ベルトコンベヤ−上における原料積載状況の検出装置