JPS6447035U - - Google Patents
Info
- Publication number
- JPS6447035U JPS6447035U JP14120687U JP14120687U JPS6447035U JP S6447035 U JPS6447035 U JP S6447035U JP 14120687 U JP14120687 U JP 14120687U JP 14120687 U JP14120687 U JP 14120687U JP S6447035 U JPS6447035 U JP S6447035U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- suction table
- dielectric
- suction
- separated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14120687U JPS6447035U (me) | 1987-09-16 | 1987-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14120687U JPS6447035U (me) | 1987-09-16 | 1987-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6447035U true JPS6447035U (me) | 1989-03-23 |
Family
ID=31406072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14120687U Pending JPS6447035U (me) | 1987-09-16 | 1987-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6447035U (me) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5633835A (en) * | 1979-08-29 | 1981-04-04 | Hitachi Ltd | Holding mechanism for plate shaped substance |
| JPS6013047B2 (ja) * | 1977-07-05 | 1985-04-04 | 株式会社日立製作所 | 溶接継手の熱処理方法 |
-
1987
- 1987-09-16 JP JP14120687U patent/JPS6447035U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6013047B2 (ja) * | 1977-07-05 | 1985-04-04 | 株式会社日立製作所 | 溶接継手の熱処理方法 |
| JPS5633835A (en) * | 1979-08-29 | 1981-04-04 | Hitachi Ltd | Holding mechanism for plate shaped substance |